To evaluate the creep property of nano or submicron meter-thick metallic films, we develop a method for fabricating a freestanding-film specimen and a uniaxial creep testing for the specimen. Using the methods we conduct creep experiments for Al films with thicknesses of about 200 and 370 nm at a room temperature (296 ± 2 K) under applied stresses ranging from 30 to 120 MPa. The results show a typical creep behavior consisted of transient, steady state and accelerating creep stages. Strain rate at the steady-state increases with an increase in applied stress; the power law relationship, i.e. Norton law, is observed between them. Little significant differences are observed in the steady state behavior between 200 and 370 nm-thick specimens.