2005年3月
Experimental and theoretical investigations of delamination at free edge of interface between piezoelectric thin films on a substrate
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
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- 巻
- 42
- 号
- 5-6
- 開始ページ
- 1729
- 終了ページ
- 1741
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/j.ijsolstr.2004.08.004
- 出版者・発行元
- PERGAMON-ELSEVIER SCIENCE LTD
The interface strength of Pb(Zr,Ti)O-3 (PZT) thin films on a silicon substrate is studied experimentally and theoretically in this work. The focus is put on crack initiation from the free edge of the interface. A novel method of sandwiched cantilever specimen is utilized to perform the delamination tests. Theoretical analyses are performed on the singular behavior of the stress in the vicinity of the free edge along the interface between Cr layer and PZT layer, and on the distribution of normal stress at the delarnination loads. Based on these results, a delamination criterion involving stress intensity parameter is adopted to estimate the interface toughness for crack initiation at the free edge along the interface Cr/PZT. (C) 2004 Elsevier Ltd. All rights reserved.
- リンク情報
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- DOI
- https://doi.org/10.1016/j.ijsolstr.2004.08.004
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000226257700023&DestApp=WOS_CPL
- URL
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=9944251825&origin=inward
- ID情報
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- DOI : 10.1016/j.ijsolstr.2004.08.004
- ISSN : 0020-7683
- SCOPUS ID : 9944251825
- Web of Science ID : WOS:000226257700023