2015
Suppression of byproduct generation at 4H-SiC/SiO2 interface by the control of oxidation conditions characterized by infrared spectroscopy
Applied Physics Express
- ,
- Volume
- 8
- Number
- 2
- Language
- Publishing type
- Research paper (scientific journal)
- DOI
- 10.7567/APEX.8.021401
- Link information
- ID information
-
- DOI : 10.7567/APEX.8.021401
- ORCID - Put Code : 45785853
- Web of Science ID : WOS:000350091400007