論文

査読有り
2010年

Integrated Radiation Image Sensors with SOI technology

2010 IEEE INTERNATIONAL SOI CONFERENCE
  • Yasuo Arai
  • ,
  • Toshinobu Miyoshi
  • ,
  • Ryo Ichimiya
  • ,
  • Kazuhiko Hara
  • ,
  • Yoshiyuki Onuki

記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.1109/SOI.2010.5641403
出版者・発行元
IEEE

We have developed monolithic radiation detectors based on a 0.2 mu m Fully-Depleted Silicon-on-Insulator (FD-SOI) CMOS technology. It has both a thick, high-resistivity sensor layer and a thin LSI circuit layer in a single chip. To shield the electronics part from the sensor region, we have created a buried well region under the buried oxide (BOX) layer of the SOI wafer. Two type of detectors, integration and counting types, are being developed.

リンク情報
DOI
https://doi.org/10.1109/SOI.2010.5641403
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000287366100060&DestApp=WOS_CPL
ID情報
  • DOI : 10.1109/SOI.2010.5641403
  • ISSN : 1078-621X
  • Web of Science ID : WOS:000287366100060

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