2003年
Photoinduced volume changes in doped a-Si : H films
PROCEEDINGS OF 3RD WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION, VOLS A-C
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- 巻
- B
- 号
- 開始ページ
- 1611
- 終了ページ
- 1614
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- 出版者・発行元
- WCPEC-3 ORGANIZING COMMITTEE
Photoinduced volume changes in B and P doped a-Si:H films prepared by plasma enhanced chemical vapor deposition (PECVD) method have been studied. It is found that the magnitude of photoinduced volume expansion (DeltaV/V) in doped films is larger (DeltaV/V similar to 6 x 10(-5)) Up to a doping ratio of 0.5 % than that of undoped films of DeltaV/V similar to 10(-6). And, the photo-response of the conductivity degrades with doping ratio. These results cannot be explained by monotonous movements of Fermi level with doping ratio. The origin of the result is proposed to be local structure changes in a-Si: H network by doping.
- リンク情報
- ID情報
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- Web of Science ID : WOS:000222658800408