We examined structural changes related to charge ordering (CO) in the temperature window between 100 K and room temperature (BT) in YFe2O4-delta by transmission electron microscopy. Characteristic diffuse scattering elongated along the [001] direction through the (1/3 1/3 0)-type reciprocal positions was found at RT, which is related to the microdomains due to the CO with a size of 10 - 20 run. In addition, it was also found that the superlattice structures characterized by the (1/3 - eta1/3 + eta0)-type modulation vector, which should be due to the vacancy ordering, coexist with the microdomains due to the CO. On the other hand, in stoichimetric YFe2O4, We found temperature variations of the superlattice structures on warming from 100 K, which should be strongly related to the dielectric anomalies in YFe2O4.