2014年
LONG STROKE OUT-OF-PLANE ACTUATOR USING COMBINATION OF ELECTROSTATIC AND PNEUMATIC FORCES
2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
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- 巻
- 27th Vol.2
- 号
- 開始ページ
- 913
- 終了ページ
- 916
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1109/MEMSYS.2014.6765790
- 出版者・発行元
- IEEE
We propose an out-of-plane MEMS actuator with a large stroke length comparable to the size of the actuator itself. The proposed device is actuated by the combined forces of the electrostatic and the pneumatic forces. This combination of two independent forces enlarges a stable area during the actuation, resulting in a large stroke which is difficult to be achieved with only either force. The 3D profiling by the laser scanning microscopy confirmed the largest stroke of 103 mu m was obtained with the 150-mu m-diameter actuator area with the electric field of 5.8 x 10(5) V/m (330V between the electrodes) and the air pressure of 2.0 kPa.
- リンク情報
- ID情報
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- DOI : 10.1109/MEMSYS.2014.6765790
- ISSN : 1084-6999
- J-Global ID : 201402208208618263
- Web of Science ID : WOS:000352217500233