MISC

2011年11月8日

3364 High-aspect-ratio Microdrilling with Laser Ablation

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
  • HIDAI Hirofumi
  • ,
  • ITOH Sho
  • ,
  • TOKURA Hitoshi

2011
6
開始ページ
"3364
終了ページ
1"-"3364-4"
記述言語
英語
掲載種別
出版者・発行元
一般社団法人日本機械学会

We demonstrated high-aspect-ratio microdrilling in borosilicate glass with the fourth harmonic of a nanosecond Nd:YVO_4 laser. This laser illumination yielded drilled holes with diameters of φ8.2 ± 3.1μm and φ6.3 ± 1.0μm at depths from 480 to 2040μm and from 1360 to 2040μm, resulting in aspect ratios of higher than 190 and 100, respectively. The profile of the drilled hole and the influence of the beam profile on the hole profile were investigated.

リンク情報
CiNii Articles
http://ci.nii.ac.jp/naid/110009973587
CiNii Books
http://ci.nii.ac.jp/ncid/AA11902070
ID情報
  • CiNii Articles ID : 110009973587
  • CiNii Books ID : AA11902070

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