MISC

査読有り
2003年

Study of surface morphological evolution by cluster ion irradiation on solid targets

MORPHOLOGICAL AND COMPOSITIONAL EVOLUTION OF THIN FILMS
  • T Aoki
  • ,
  • A Nakai
  • ,
  • J Matsuo
  • ,
  • G Takaoka

749
開始ページ
311
終了ページ
316
記述言語
英語
掲載種別
出版者・発行元
MATERIALS RESEARCH SOCIETY

Smoothing effect by large gas cluster ion irradiation was studied. Ar cluster ion beams were irradiated on rough Si surface with various ion dosage. 100x100mum(2) AFM image was measured for each surface. These AFM images were treated with fast Fourier transform in order to examine the change of surface morphologies with cluster ion irradiation. Power spectra analysis showed that the intensity at each wave number (the inverse number of wavelength) exponentially decreases with ion dose. The relationship between smoothing rate and wave number was derived. The surface smoothing process was modeled with the use of this wave number dependence on decreasing rate. The calculated and the experimental surface profiles are in good agreements. With this model, roughness of cluster-irradiated surface can be calculated from initial surface images.

リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000185075500047&DestApp=WOS_CPL
ID情報
  • ISSN : 0272-9172
  • Web of Science ID : WOS:000185075500047

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