論文

査読有り
2016年5月

Development of ambient SIMS using mega-electron-volt-energy ion probe

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
  • Masakazu Kusakari
  • ,
  • Makiko Fujii
  • ,
  • Toshio Seki
  • ,
  • Toshio Seki
  • ,
  • Takaaki Aoki
  • ,
  • Jiro Matsuo

34
3
開始ページ
4
終了ページ
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1116/1.4941724

© 2016 American Vacuum Society.A new secondary ion mass spectrometry device using an ion probe in the heavy mega-electron-volt (MeV) energy range was developed for detecting large intact molecules with high sensitivity under ambient conditions. The instrument is based on the characteristics induced by the MeV-energy heavy ions, namely, electronic excitation induced in the near-surface region and the high transmission capability under ambient conditions. The secondary ions were transported to the mass analyzer effectively by an electric field and atmospheric gas flow, whereas the chemical impurities from the gas were cleared by using an electric field. In addition, this new ambient analysis approach enables evaluation not only of solid samples, but also of liquid samples that were evaporated under advanced vacuum. In this study, liquid water and samples of a benzoic acid solution were measured under ambient conditions.

リンク情報
DOI
https://doi.org/10.1116/1.4941724
J-GLOBAL
https://jglobal.jst.go.jp/detail?JGLOBAL_ID=201602245934964986
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000377673400011&DestApp=WOS_CPL
ID情報
  • DOI : 10.1116/1.4941724
  • ISSN : 2166-2746
  • J-Global ID : 201602245934964986
  • ORCIDのPut Code : 50030333
  • SCOPUS ID : 84960192564
  • Web of Science ID : WOS:000377673400011

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