2016年5月
Development of ambient SIMS using mega-electron-volt-energy ion probe
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
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- 巻
- 34
- 号
- 3
- 開始ページ
- 4
- 終了ページ
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1116/1.4941724
© 2016 American Vacuum Society.A new secondary ion mass spectrometry device using an ion probe in the heavy mega-electron-volt (MeV) energy range was developed for detecting large intact molecules with high sensitivity under ambient conditions. The instrument is based on the characteristics induced by the MeV-energy heavy ions, namely, electronic excitation induced in the near-surface region and the high transmission capability under ambient conditions. The secondary ions were transported to the mass analyzer effectively by an electric field and atmospheric gas flow, whereas the chemical impurities from the gas were cleared by using an electric field. In addition, this new ambient analysis approach enables evaluation not only of solid samples, but also of liquid samples that were evaporated under advanced vacuum. In this study, liquid water and samples of a benzoic acid solution were measured under ambient conditions.
- リンク情報
- ID情報
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- DOI : 10.1116/1.4941724
- ISSN : 2166-2746
- J-Global ID : 201602245934964986
- ORCIDのPut Code : 50030333
- SCOPUS ID : 84960192564
- Web of Science ID : WOS:000377673400011