2000年
Surface smoothing mechanism of gas cluster ion beams
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
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- ,
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- 巻
- 161
- 号
- 開始ページ
- 980
- 終了ページ
- 985
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/S0168-583X(99)00771-5
- 出版者・発行元
- Elsevier Science Publishers B.V.
Sputtering phenomena by gas cluster ions were modeled based on experimental results, and the surface smoothing effects with cluster ion beam were studied with Monte Carlo simulations. When a cluster ion impacts a slope, ejected atoms move down the slope, and consequently, the valley is filled by these dislocated atoms. An initially rough surface is made smooth by these effects. The dislocated atoms filling the valley are eventually removed with increasing dose, and finally, a very smooth surface with a thin, damaged layer can be obtained. Due to the small distance of the atomic motion induced by a cluster-ion impact, surfaces with narrow hill-and-valley are smoothed initially, and those with longer-scale roughness require more ion-dose to be smoothed.
- リンク情報
- ID情報
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- DOI : 10.1016/S0168-583X(99)00771-5
- ISSN : 0168-583X
- SCOPUS ID : 0033892605
- Web of Science ID : WOS:000086204100185