2006年1月
Cluster size dependence of sputtering yield by cluster ion beam irradiation
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- ,
- ,
- 巻
- 242
- 号
- 1-2
- 開始ページ
- 179
- 終了ページ
- 181
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/j.nimb.2005.08.023
- 出版者・発行元
- ELSEVIER SCIENCE BV
In order to investigate the dependence of the sputtering yield on cluster size, surfaces were irradiated with cluster ion beams with various size distributions, and the sputtering yields were measured. It was found that there was a threshold energy for sputtering with cluster ion irradiation. When the cluster size was constant, the sputtering yield was proportional to acceleration energy. These results suggested an empirical formula to calculate sputtering yield from the ion energy and the size distribution of the cluster. The empirical formula indicates that the sputtering yield is proportional to the 1.1 power of the size, when the acceleration energy per atom is constant. (c) 2005 Elsevier B.V. All rights reserved.
- リンク情報
- ID情報
-
- DOI : 10.1016/j.nimb.2005.08.023
- ISSN : 0168-583X
- Web of Science ID : WOS:000236225200048