論文

査読有り
2018年7月20日

Theoretical study of the atomistic behavior of O vacancy complexes with N and H atoms in the SiO2 layer of a metal–oxide–nitride–oxide–semiconductor memory: Physical origin of the irreversible threshold voltage shift observed in metal–oxide–nitride–oxide–semiconductor memories

Japanese Journal of Applied Physics
  • Shirakawa Hiroki
  • ,
  • Araidai Masaaki
  • ,
  • Kamiya Katsumasa
  • ,
  • Shiraishi Kenji

57
8
開始ページ
81101
終了ページ
81101
DOI
10.7567/jjap.57.081101
出版者・発行元
Japan Society of Applied Physics

リンク情報
DOI
https://doi.org/10.7567/jjap.57.081101
CiNii Articles
http://ci.nii.ac.jp/naid/210000149406
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000439346600001&DestApp=WOS_CPL
ID情報
  • DOI : 10.7567/jjap.57.081101
  • ISSN : 0021-4922
  • CiNii Articles ID : 210000149406
  • Web of Science ID : WOS:000439346600001

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