Keiichiro URABE

Profile Information

Affiliation: Associate Professor, Graduate School of Engineering, Department of Aeronautics and Astronautics, Kyoto University

Degree: Ph.D.(Kyoto University)

ORCID ID: https://orcid.org/0000-0001-9743-3184
J-GLOBAL ID: 201401028945853328
Researcher ID: H-6501-2018
researchmap Member ID: B000237228

External link: http://www.propulsion.kuaero.kyoto-u.ac.jp/w/index.php?title=Top&setlang=en

Research History

2024 - Present

Associate Professor, Graduate School of Engineering, Department of Aeronautics and Astronautics, Kyoto University
2018 - 2024

Assisant Professor, Graduate School of Engineering, Department of Aeronautics and Astronautics, Kyoto University
2015 - 2018

Researcher, Air Liquide Laboratories
2012 - 2014

Research Fellow (PD), Japan Society for the Promotion of Science
2012 - 2014

Research Fellow, Department of Advanced Materials Science, The University of Tokyo
2009 - 2012

Research Assistant, Photonics and Electronics Science and Engineering, Kyoto Univ. GCOE program
2009 - 2012

Research Fellow (DC1), Japan Society for the Promotion of Science

Education

Awards

2021

19th Plasma Electronics Award, Plasma Electronics Division, The Japan Society of Applied Physics

Yoshihiro Sato, Satoshi Shibata, Keiichiro Urabe, Koji Eriguchi
2018

Masao Horiba Awards 2018, HORIBA

Keiichiro URABE
2014

Best Presentation Award (Oral in Plasma Science), ISPlasma 2014 / IC-PLANTS 2014

Keiichiro URABE
2013

Award for Encouragement of Research in Materials Science, MRS-J

Keiichiro URABE
2013

Prize for the Best Combination of Pre-Poster Talk and Poster Presentation, 16th International Symposium on Laser-Aided Plasma Diagnostics

Keiichiro URABE
2012

Young Scientist Awards: Silver Award, IUMRS-ICEM2012

Keiichiro URABE
2010

Outstanding Presentation Award at Report Meeting of Grant for Ph.D. Students, Grobal COE Program on Photonic and Electronic Science and Engineering at Kyoto University

Keiichiro URABE
2007

Young Scientist Oral Presentation Award at the 2007 Autumn Meeting, The Japan Society of Applid Physics

Keiichiro URABE

Papers

Investigation of small-fraction molecular impurities in high-pressure helium plasmas using optical plasma diagnostic methods

Keiichiro Urabe, Minami Toyoda, Yoshinori Matsuoka, Koji Eriguchi

PLASMA SOURCES SCIENCE AND TECHNOLOGY, 33(2) 025011, Feb, 2024 Peer-reviewedLead authorCorresponding author
In situ electrical monitoring of SiO2/Si structures in low-temperature plasma using impedance spectroscopy

Junki Morozumi, Takahiro Goya, Tomohiro Kuyama, Koji Eriguchi, Keiichiro Urabe

JAPANESE JOURNAL OF APPLIED PHYSICS, 62(SI) SI1010, May, 2023 Peer-reviewedLast author
Predicting the effects of plasma-induced damage on p–n junction leakage and its application in the characterization of defect distribution

Yoshihiro Sato, Satoshi Shibata, Kazuko Nishimura, Masayuki Yamasaki, Masashi Murakami, Keiichiro Urabe, Koji Eriguchi

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, 40(6) 062209, Nov, 2022 Peer-reviewed
Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas

Seiya Kito, Keiichiro Urabe, Koji Eriguchi

JAPANESE JOURNAL OF APPLIED PHYSICS, 61(10) 106002, Sep, 2022 Peer-reviewedCorresponding author
Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique

T. Matsuda, T. Hamano, Y. Asamoto, M. Noma, M. Yamashita, S. Hasegawa, K. Urabe, K. Eriguchi

JAPANESE JOURNAL OF APPLIED PHYSICS, 61(SI) SI1014, Jul, 2022 Peer-reviewed
Characterization of Plasma Process-Induced Low-Density Defect Creation by Lateral Junction Leakage

Yoshihiro Sato, Satoshi Shibata, Takayoshi Yamada, Kazuko Nishimura, Masayuki Yamasaki, Masashi Murakami, Keiichiro Urabe, Koji Eriguchi

IEEE JOURNAL OF THE ELECTEON DEVICES SOCIETY, 10 769-777, May, 2022 Peer-reviewedInvited
Quantitative evaluation of plasma-damaged SiN/Si structures using bias-dependent admittance analysis

Tomohiro Kuyama, Keiichiro Urabe, Koji Eriguchi

JOURNAL OF APPLIED PHYSICS, 131(13) 133302, Apr, 2022 Peer-reviewed
Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method

Takashi Hamano, Takayuki Matsuda, Yuya Asamoto, Masao Noma, Shigehiko Hasegawa, Michiru Yamashita, Keiichiro Urabe, Koji Eriguchi

APPLIED PHYSICS LETTERS, 120(3) 031904, Jan, 2022 Peer-reviewed
Characterization of dynamic behaviors of defects in Si substrates created by H2 plasma using conductance method

Tomohiro Kuyama, Keiichiro Urabe, Masanaga Fukasawa, Tetsuya Tatsumi, Koji Eriguchi

JAPANESE JOURNAL OF APPLIED PHYSICS, 59(SJ) SJJC02, Jun, 2020 Peer-reviewed
Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure

Florent P. Sainct, Keiichiro Urabe, Erwan Pannier, Deanna A. Lacoste, Christophe O. Laux

PLASMA SOURCES SCIENCE AND TECHNOLOGY, 29(2) 025017, Mar, 2020 Peer-reviewed
Recent progress on dispersion interferometers for nuclear fusion and low-temperature plasmas

T. Akiyama, M. A. Zeeland, T. N. Carlstrom, R. L. Boivin, K. J. Brunner, J. Knauer, R. Yasuhara, K. Tanaka, H.-Q. Liu, Y. Zhou …

JOURNAL OF INSTRUMENTATION, 15(1) C01004, Jan, 2020 Peer-reviewed
Evaluation of residual defects created by plasma exposure of Si substrates using vertical and lateral pn junctions

Yoshihiro Sato, Satoshi Shibata, Keiichiro Urabe, Koji Eriguchi

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, 38(1) 012205, Dec, 2019 Peer-reviewed
Investigation of spatial and energy profiles of plasma process-induced latent defects in Si substrate using capacitance-voltage characteristics

Takashi Hamano, Keiichiro Urabe, Koji Eriguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 52(45) 455102, Aug, 2019 Peer-reviewed
Characterization of surface modification mechanisms for boron nitride films under plasma exposure

Tomoya Higuchi, Masao Noma, Michiru Yamashita, Keiichiro Urabe, Shigehiko Hasegawa, Koji Eriguchi

SURFACE AND COATINGS TECHNOLOGY, 377 124854, Aug, 2019 Peer-reviewed
Improvement of the plasma-induced defect generation model in Si substrates and the optimization design framework

Koji Eriguchi, Takashi Hamano, Keiichiro Urabe

PLASMA PROCESS AND POLYMERS, 16(9) 1900058-1900058, Jun, 2019 Peer-reviewed
Characterization of the distribution of defects introduced by plasma exposure in Si substrate

Yoshihiro Sato, Satoshi Shibata, Akira Uedono, Keiichiro Urabe, Koji Eriguchi

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 37(1) 011304, Dec, 2018 Peer-reviewed
Dynamics of cavitation bubbles formed by pulsed-laser ablation plasmas near the critical point of CO2

Hitoshi Muneoka, Shohei Himeno, Keiichiro Urabe, Sven Stauss, Motoyoshi Baba, Tohru Suemoto, Kazuo Terashima

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 52(2) 025201, Oct, 2018 Peer-reviewed
Design of compact dispersion interferometer with a high efficiency nonlinear crystal and a low power CO2 laser

T. Akiyama, S. Yoshimura, K. Tomita, N. Shirai, T. Murakami, K. Urabe

JOURNAL OF INSTRUMENTATION, 12(12) C12028, Dec, 2017 Peer-reviewed
Laser diagnostics on atmospheric pressure discharge plasmas, including cryoplasmas, in environments around room and cryogenic temperature

Noritaka Sakakibara, Hitoshi Muneoka, Keiichiro Urabe, Ryoma Yasui, Osamu Sakai, Kazuo Terashima

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 50(16) 165201, Apr, 2017 Peer-reviewed
Diagnostics of atmospheric-pressure pulsed-dc discharge with metal and liquid anodes by multiple laser-aided methods

Keiichiro Urabe, Naoki Shirai, Kentaro Tomita, Tsuyoshi Akiyama, Tomoyuki Murakami

PLASMA SOURCES SCIENCE & TECHNOLOGY, 25(4) 045004, Aug, 2016 Peer-reviewedLead author

Presentations

Study of molecular-impurity decomposition in high-pressure helium dielectric barrier discharge generated in a closed glass cell

Minami Toyoda, Koichi Kishimoto, Koji Eriguchi, Keiichiro Urabe

The 41st Symposium on Plasma Processing, Jan 23, 2024, Plasma Electronisc Division, The Japan Society of Applied Physics
準安定励起ヘリウム原⼦を⽤いた光ポンピング磁気センサの磁場感受性についての検討

日髙颯哉, 豊田みなみ, 占部継一郎, 伊藤陽介

マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会, Dec 21, 2023, 電気学会
Degradation of dielectric film by low-temperature plasma exposure investigated using in-situ impedance spectroscopy method

Keiichiro Urabe, Junki Morozumi, Koji Eriguchi

3rd Materials Research Meeting (MRM2023) / 24th International Union of Materials Research Societies-International Conference in Asia (IUMRS-ICA2023), Dec 15, 2023, Materials Research Society of Japan (MRS-J)
Development of harmonic spectroscopy method to analyze electric circuit including non-linear resistance and its application to measure plasma and surface parameters

Junki Morozumi, Koji Eriguchi, Keiichiro Urabe

The 84th JSAP Autumn Meeting, Sep 23, 2023, The Japan Society of Applied Physics
Diagnostics of Ion Sheath on an AC-Biased Metal Plate Using Time-Resolved Laser-Induced Fluorescence Spectroscopy

Ryosuke Takahashi, Seiya Kito, Koji Eriguchi, Keiichiro Urabe

The 84th JSAP Autumn Meeting, Sep 23, 2023, The Japan Society of Applied Physics
Measurement of the density of helium metastable atoms and investigation of magnetic field susceptibility in helium-4 optically pumped magnetometers

Soya Hidaka, Minami Toyoda, Keiichiro Urabe, Yosuke Ito

The 84th JSAP Autumn Meeting, Sep 22, 2023, The Japan Society of Applied Physics
Investigation of Molecular-Impurity Decomposition in High-Pressure Low-Temperature Plasmas Using Laser Absorption Spectroscopy

Keiichiro Urabe, Minami Toyoda, Yoshinori Matsuoka, Koji Eriguchi

20th International Symposium on Lase-Aided Plasma Diagnostics, Sep 12, 2023
Time-resolved laser-induced fluorescence spectroscopy with a continuous-wave diode laser for the investigation of ion sheath dynamics

Ryosuke Takahashi, Seiya Kito, Koji Eriguchi, Keiichiro Urabe

20th International Symposium on Lase-Aided Plasma Diagnostics, Sep 12, 2023
Monitoring of plasma parameters in afterglow of surface-wave argon plasma by a floating harmonic probe method

Michiru Sasahara, Junki Morozumi, Koji Eriguchi, Keiichiro Urabe

25th International Symposium on Plasma Chemistry, May 22, 2023, International Plasma Chemistry Society
Behaviors of optical emission from a dielectric barrier discharge in a He gas flow with small-fraction H2O impurity

Minami Toyoda, Yoshinori Matsuoka, Koji Eriguchi, Keiichiro Urabe

25th International Symposium on Plasma Chemistry, May 22, 2023, International Plasma Chemistry Society
In-situ diagnostics of dielectric-film properties in plasmas using impedance spectroscopy

Keiichiro Urabe, Junki Morozumi, Tomohiro Kuyama, Koji Eriguchi

32nd Annual Meeting of MRS-Japan 2022, Dec 5, 2022, The Material Research Society of Japan
In-situ electrical monitoring of SiO2/Si structures in low-temperature plasma

Junki Morozumi, Takahiro Goya, Koji Eriguchi, Keiichiro Urabe

2022 International Symposium on Dry Process, Nov 25, 2022
Production of metastable-state argon ions in an electron cyclotron resonance plasma investigated by laser-induced fluorescence spectroscopy

Ryosuke Takahashi, Seiya Kito, Koji Eriguchi, Keiichiro Urabe

75th Annual Gaseous Electronics Conference / 11th International Conference on Reactive Plasmas, Oct 5, 2022, American Physical Society / Japan Society of Applied Physics
Quantification of molecular impurity ratio in high-pressure helium dielectric barrier discharge by laser absorption spectroscopy

Keiichiro Urabe, Minami Toyoda, Yasunori Matsuoka, Koji Eriguchi

75th Annual Gaseous Electronics Conference / 11th International Conference on Reactive Plasmas, Oct 5, 2022, American Physical Society / Japan Society of Applied Physics
Study on density and lifetime of helium metastable atoms for helium-4 optically pumped magnetometers

Soya Hidaka, Yosuke Ito, Keiichiro Urabe

83rd JSAP Automn Metting, Sep 22, 2022, Japan Society of Applied Physics
Monitoring of Material Surface Modification in Plasmas Using a Floating Harmonic Probe Method

Junki Morozumi, Koji Eriguchi, Keiichiro Urabe

83rd JSAP Automn Metting, Sep 20, 2022, Japan Society of Applied Physics
Behaviors of metastable-state argon ion density in an electron cyclotron resonance plasma source measured by laser-induced fluorescence spectroscopy

Seiya Kito, Koji Eriguchi, Keiichiro Urabe

2021 International Symposium on Dry Process, Nov 19, 2021
Experimental study on impurity species in high-pressure helium plasmas

Keiichiro Urabe

37th Kyushu-Yamaguchi Plasma Workshop, Nov 7, 2021, Committee of Kyushu-Yamaguchi Plasma Workshop Invited
Characterization and control of boron nitride film deposition by a reactive plasma-assisted coating

Keiichiro Urabe, Takayuki Matsuda, Takashi Hamano, Yuya Asamoto, Masao Noma, Michiru Yamashita, Shigehiko Hasegawa, Koji Eriguchi

5th Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2021), Sep 28, 2021, Division of Plasma Physics, Association of Asia Pacific Physical Societies Invited
Monitoring of Probe Surface in Plasmas Using Impedance Spectroscopy

Junki Morozumi, Tomohiro Kuyama, Seiya Kito, Keiichiro Urabe, Koji Eriguchi

82nd JSAP Automn Metting, Sep 10, 2021, Japan Society of Applied Physics

Misc.

プラズマエレクトロニクス賞を受賞して

佐藤好弘, 柴田聡, 占部継一郎, 江利口浩二

応用物理学会プラズマエレクトロニクス分科会会報, 74 25-27, Jun, 2021 Invited
Plasma etching process for advanced CMOS and memory device fabrication

Koji Eriguchi, Keiichiro Urabe

Oyo Butsuri, 87(12) 895-901, Dec, 2018 Invited
High-speed and precise laser interferometry developed for plasma electron-density diagnostics

Keiichiro URABE

Readout, HORIBA Technical Report, 51 10-1, Oct, 2018 Invited
レーザー干渉計を用いた高気圧非平衡プラズマ診断

占部継一郎

応用物理学会プラズマエレクトロニクス分科会会報, 60 18-20, Jun, 2014 Invited

Books and Other Publications

Applications of Laser Ablation - Thin Film Deposition, Nanomaterial Synthesis and Surface Modification

Stauss Sven, Urabe Keiichiro, Muneoka Hitoshi, Terashima Kazuo (Role: Contributor, Pulsed Laser Ablation in High-Pressure Gases, Pressurized Liquids and Supercritical Fluids: Generation, Fundamental Characteristics and Applications)

IntechOpen Ltd, Dec, 2016 (ISBN: 9789535128120)
CO2 Laser - Optimisation and Application

Keiichiro Urabe, Kunihide Tachibana (Role: Contributor, Heterodyne Interferometer for Measurement of Electron Density in High-Pressure Plasmas)

IntechOpen Ltd, Mar, 2012 (ISBN: 9789535103516)

Research Projects

Harmonic impedance spectroscopy and its application to surface monitoring

Research Grant, The Kyoto University Foundation, 2022 - 2023

Keiichiro URABE
3D visualization of excited species in plasmas by optical pumping method

39th Resarch Grant, CASIO Science Promotion Foundation, 2021 - 2022

Keiichiro URABE, Yosuke ITO
Stabilization of dispersion interferometer utilizing gas reflactive-index dispersion

General Collaboration Research, National Institute for Fusion Science, 2020 - 2022

Keiichiro Urabe, Shinji Yoshimura
Multi-dimension high-throuput LIF diagnostics for flowing ions from plasmas

KAKENHI, Grant-in-Aid for Scientific Research (B), JSPS, 2019 - 2022

Keiichiro URABE
Absolute-density measurement and precision magnetometry using quantum-state control of plasma excited species

KAKENHI, Grant-in-Aid for Challenging Research (Exploratory), JSPS, 2019 - 2021

Keiichiro Urabe, Yosuke Ito
Precision plasma density measurement using dispersion interferometry with gas refractive-index dispersion data

General Collaboration Research, National Institute for Fusion Science, 2019 - 2020

Keiichiro Urabe, Shinji Yoshimura
Plasma assisted deposition and annealing processes for cubic BN films

Research Grant, Iketani Science and Technology Foundation, 2019 - 2020

Keiichiro Urabe
Visualization of multi-layer dynamics of gas and excited species in small-scale thermal non-equilibruim plasmas

KAKENHI, Grant-in-Aid for Research Activity Start-up, JSPS, 2018 - 2019

Keiichiro URABE
Fast 3D imaging of electron density distribution in high-pressure plasmas by quantum cascade laser interferometer

KAKENHI, Grant-in-Aid for Challenging Exploratory Research, JSPS, 2014 - 2015

Keiichiro URABE
Fundamental and novel optical properties in plasmas generated in extremely high-density media

KAKENHI, Grant-in-Aid for JSPS Fellows, JSPS, 2012 - 2014

Keiichiro Urabe
Spectroscopic study on discharge plasma in inhomogeneous high-pressure gases

KAKENHI, Grant-in-Aid for JSPS Fellows, JSPS, 2009 - 2011

Keiichiro Urabe

Teaching Experience

Social Activities

Novel plasma technologies and optical plasma diagnostics

Lecturer

The Institution of Professional Engineers, Janualy meeting, Jan 11, 2019
Spectroscopic diagnostics of excited species generated in atmospheric pressure plasmas

Lecturer

Kyoto University, Kyoto Univ. Industrial Day 2018, Sep 11, 2018

Professional Memberships

2021 - Present

The Japan Society of Plasma Science and Nuclear Fusion Research
2020 - Present

The Japan Society of Vacuum and Surface Science
2018 - Present

The Japan Society for Aeronautical and Space Sciences
2012 - Present

Division of Plasma Electronics, The Japan Society of Applied Physics
2007 - Present

The Japan Society of Applied Physics

Committee Memberships

2023 - Present

Investigating R&D Committee： Diagnostics of discharge, plasma, and pulse power, The Institute of Electrical Engineers of Japan
2022 - Present

Chair of Plasma Wakate (Young Resarchers) Champter, Japan Society of Applied Physics
2020 - Present

庶務幹事, 日本表面真空学会関西支部
2022 - 2023

Local Organizing Committee, The 25th International Symposium on Plasma Chemistry (ISPC25)
2021 - 2023

編集委員（2022年度 APP副主査）, プラズマ・核融合学会
2023

Local Arrangement, 21st International Workshop on Junction Technology
2022

プログラム委員, 日本表面真空学会 2022年学術講演会（IVC併催）
2020 - 2021

Program Committee, ISPlasma2021/IC-PLANTS2021
2019 - 2021

幹事, 応用物理学会プラズマエレクトロニクス分科会
2019 - 2021

幹事, 日本航空宇宙学会関西支部
2021

プログラム委員, 日本表面真空学会 2021年学術講演会
2021

Exective Committee, 42nd International Symposium on Dry Process
2021

Online Arrangement, 20th International Workshop on Junction Technology
2018 - 2019

Program Comittee, ISPlasma2019/IC-PLANTS2019
2019

Local Arrangement, 19th International Workshop on Junction Technology

Profile Information

Research History

Education

Awards

Papers

Presentations

Misc.

Books and Other Publications

Research Projects

Teaching Experience

Social Activities

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