論文

査読有り
2014年6月

Chemical State Information of Bulk Specimens Obtained by SEM-Based Soft-X-Ray Emission Spectrometry

MICROSCOPY AND MICROANALYSIS
  • Masami Terauchi
  • Shogo Koshiya
  • Futami Satoh
  • Hideyuki Takahashi
  • Nobuo Handa
  • Takanori Murano
  • Masato Koike
  • Takashi Imazono
  • Masaru Koeda
  • Tetsuya Nagano
  • Hiroyuki Sasai
  • Yuki Oue
  • Zeno Yonezawa
  • Satoshi Kuramoto
  • 全て表示

20
3
開始ページ
692
終了ページ
697
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1017/S1431927614000439
出版者・発行元
CAMBRIDGE UNIV PRESS

Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al2Pt, and Al2Au.

リンク情報
DOI
https://doi.org/10.1017/S1431927614000439
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000339158700008&DestApp=WOS_CPL
ID情報
  • DOI : 10.1017/S1431927614000439
  • ISSN : 1431-9276
  • eISSN : 1435-8115
  • Web of Science ID : WOS:000339158700008

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