論文

査読有り
2012年

Construction of simple non-evaporable getter assemblies using St 707 strips or St 172 modules

Journal of the Vacuum Society of Japan
  • Takashi Kikuchi
  • ,
  • Kazuhiko Mase
  • ,
  • Fumio Watanabe

55
1
開始ページ
21
終了ページ
23
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.3131/jvsj2.55.21

Several types of simple non-evaporable getter (NEG) assemblies have been constructed using a commercial St 707 strip or a St 172 module. Each assembly is mounted on a conflat flange with an outer diameter of 203, 70, or 34 mm (CF203, CF70, and CF34, respectively) and can be activated by direct current heating. The pumping speeds of the three NEG assemblies (the CF70-mount type using a St 707 strip, the CF70-mount type using a St 172 module, and the CF152-mount type using a St 707 strip) have been measured for N2 and H2 gasses at 20°C. The maximum pumping speeds for the three types of NEG assemblies were 4.8, 1.2, and 25 L s ?1 (8.0, 3.6, and 82 L s ?1) for N 2 (H 2), respectively. These NEG assemblies are useful for laboratory ultrahigh vacuum systems as well as vacuum ultraviolet/soft-X-ray beamlines in synchrotron radiation facilities.

リンク情報
DOI
https://doi.org/10.3131/jvsj2.55.21
CiNii Articles
http://ci.nii.ac.jp/naid/80022332488
ID情報
  • DOI : 10.3131/jvsj2.55.21
  • ISSN : 1882-2398
  • CiNii Articles ID : 80022332488
  • SCOPUS ID : 84857247209

エクスポート
BibTeX RIS