2012年4月
Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram
JOURNAL OF APPLIED PHYSICS
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- 巻
- 111
- 号
- 8
- 開始ページ
- 083107
- 終了ページ
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1063/1.4705286
- 出版者・発行元
- AMER INST PHYSICS
A new 3D microfabrication method has been developed, which uses only a single femtosecond laser pulse and a hologram. For the microfabrication inside transparent materials, the optical axial elongation of the fabricated structure is a major problem that has thus far limited design flexibility, especially for the direction along the optical axis. By controlling the light intensity distribution profile and using the adequate focal length of the hologram, this problem was solved and homogeneous and elongation-free 3D microfabrication was achieved. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4705286]
- リンク情報
- ID情報
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- DOI : 10.1063/1.4705286
- ISSN : 0021-8979
- Web of Science ID : WOS:000303598800007