論文

査読有り
2012年4月

Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram

JOURNAL OF APPLIED PHYSICS
  • M. Yamaji
  • ,
  • H. Kawashima
  • ,
  • J. Suzuki
  • ,
  • S. Tanaka
  • ,
  • M. Shimizu
  • ,
  • K. Hirao
  • ,
  • Y. Shimotsuma
  • ,
  • K. Miura

111
8
開始ページ
083107
終了ページ
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1063/1.4705286
出版者・発行元
AMER INST PHYSICS

A new 3D microfabrication method has been developed, which uses only a single femtosecond laser pulse and a hologram. For the microfabrication inside transparent materials, the optical axial elongation of the fabricated structure is a major problem that has thus far limited design flexibility, especially for the direction along the optical axis. By controlling the light intensity distribution profile and using the adequate focal length of the hologram, this problem was solved and homogeneous and elongation-free 3D microfabrication was achieved. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4705286]

リンク情報
DOI
https://doi.org/10.1063/1.4705286
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000303598800007&DestApp=WOS_CPL
URL
http://repository.kulib.kyoto-u.ac.jp/dspace/handle/2433/160651
ID情報
  • DOI : 10.1063/1.4705286
  • ISSN : 0021-8979
  • Web of Science ID : WOS:000303598800007

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