小林 健

Roles of non-switchable domains and internal bias in electrocaloric and pyroelectric effects 

Japanese Journal of Applied Physics 64(9) 09SP03-09SP03 2025年9月1日  

Real-Time Monitoring of Haptic Response Using Ultra-Thin SI/PZT Stacked Sensors and Actuators in Soft Flexible Packaging for Wearable and Medical Applications 

2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) 1921-1924 2025年6月29日  

Low-Voltage Millimeter-Scale Liquid Micropump Using a PZT Thin-Film Diaphragm Actuator for a 3D-Stacked Fluid Sensor System 

2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) 2028-2031 2025年6月29日  

Flexible no-drift data glove using ultrathin silicon for the metaverse 

Device 3(5) 100686-100686 2025年5月  

Directional enhancement of pyroelectricity in Pb(Zr0.52Ti0.48)O3 films by DC poling 

Applied Physics Letters 126(9) 2025年3月1日  

Soft Packaging of Flexible Piezoelectric Actuators for Applications in Wearable Haptic Devices 

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) 383-385 2024年1月21日  

Representing Fine Texture of Pencil Hardness by High-Frequency Vibrotactile Equivalence Conversion Using Ultra-Thin PZT-MEMS Vibrators. 

IEEE Transactions on Haptics 17(1) 8-13 2024年  

Lever Mechanism for Diaphragm-Type Vibrators to Enhance Vibrotactile Intensity. 

IEEE Trans. Haptics 17(1) 20-25 2024年  

Development of an Electrical-Stimulation-Induced Mechanomyogram Probe for Muscle Contraction Characteristics Evaluation 

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) 400-401 2023年1月15日  

Ultra-Thin Mems Packaging Based on Auxetic Stretchable Structures for Applications in Wearable Electronics 

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) 359-361 2023年1月15日  

Development of wearable multi-lead ECG measurement device using cubic flocked electrode. 

Scientific reports 12(1) 19308-19308 2022年11月11日  

In-situ observation of reversible 90°-domain switching in Pb(Zr, Ti)O3 films for microcantilever structure 

Japanese Journal of Applied Physics 2022年11月1日  

Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator 

JOURNAL OF MICROMECHANICS AND MICROENGINEERING 32(10) 2022年10月  

Development of a nail-deformation haptics device fabricated adopting ultra-thin PZT-MEMS technology 

Japanese Journal of Applied Physics 61(SN) SN1024-SN1024 2022年8月18日  

Development of Flexible Haptic Device Based on Ultra-Thin PZT/Silicon Vibrator Array 

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2021- 127-130 2021年1月25日  

Flexible substrate with floating island structure for mounting ultra-thin silicon chips 

FLEXIBLE AND PRINTED ELECTRONICS 5(2) 2020年6月  

Relationship between Contact Pressure and Motion Artifacts in ECG Measurement with Electrostatic Flocked Electrodes Fabricated on Textile 

SCIENTIFIC REPORTS 9 2019年4月  

Investigation of Broadband Characteristics of Multi-Frequency Piezoelectric Micromachined Ultrasonic Transducer (MF-pMUT) 

IEEE SENSORS JOURNAL 19(3) 860-867 2019年2月  

Plastic-scale-model assembly of ultrathin film MEMS piezoresistive strain sensor with conventional vacuum-suction chip mounter 

SCIENTIFIC REPORTS 9 2019年2月  

NOVEL METHOD FOR SIMULTANEOUSLY IMPLEMEMTING "WIRED FACE-UP AND FACE-DOWN CHIPS" ON A FILM SUBSTRATE BY USING SIMPLE SCREEN-OFFSET PRINTING 

2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 103-104 2019年  

Fabrication of an ultrathin lead zirconate titanate mirror device mounted on flexible substrate 

JAPANESE JOURNAL OF APPLIED PHYSICS 56(10) 2017年10月  

Printed strain sensor array for application to structural health monitoring 

SMART MATERIALS AND STRUCTURES 26(10) 2017年10月  

Soft-rubber-packaged Pb(Zr, Ti)O-3 MEMS touch sensors for human-machine interface applications 

JAPANESE JOURNAL OF APPLIED PHYSICS 56(4) 2017年4月  

DEVELOPMENT OF ULTRA-THIN MEMS MICRO MIRROR DEVICE 

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) 2143-2146 2017年  

Ultra-Thin Piezoelectric Strain Sensor Array Integrated on a Flexible Printed Circuit Involving Transfer Printing Methods 

IEEE SENSORS JOURNAL 16(24) 8840-8846 2016年12月  

Manufacturing process for piezoelectric strain sensor sheet involving transfer printing methods 

JAPANESE JOURNAL OF APPLIED PHYSICS 54(10) 2015年10月  

Influence of pulse poling on the piezoelectric property of Pb(Zr-0.52, Ti-0.48)O-3 thin films 

AIP ADVANCES 4(11) 2014年11月  

A piezoelectric cantilever with a Helmholtz resonator as a sound pressure sensor 

JOURNAL OF MICROMECHANICS AND MICROENGINEERING 23(11) 2013年11月  

Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties of Tetragonal Composition Pb(Zr-0.3,Ti-0.7)O-3 Thin Films on Microelectromechanical Systems Microcantilevers 

JAPANESE JOURNAL OF APPLIED PHYSICS 52(9) 2013年9月  

An electrostatic field sensor operated by self-excited vibration of MEMS-based self-sensitive piezoelectric microcantilevers 

Sensors and Actuators A: Physical 198 87-90 2013年8月  

Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications 

SENSORS AND ACTUATORS A-PHYSICAL 184 149-159 2012年9月  

A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors 

Smart Materials and Structures 20(6) 065017-065017 2011年5月25日  

A digital output piezoelectric accelerometer using a Pb(Zr, Ti)O₃thin film array electrically connected in series 

Smart Materials and Structures 19(10) 105030-105030 2010年9月15日  

In situ Observation of the Fatigue-Free Piezoelectric Microcantilever by Two-Dimensional X-ray Diffraction 

JAPANESE JOURNAL OF APPLIED PHYSICS 48(9) 2009年9月  

Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO₃buffered Pb(Zr,Ti)O₃thin film 

Smart Materials and Structures 18(6) 065008-065008 2009年5月6日  

A fatigue test method for Pb(Zr,Ti)O₃thin films by using MEMS-based self-sensitive piezoelectric microcantilevers 

Journal of Micromechanics and Microengineering 18(11) 115007-115007 2008年9月24日  

Microelectromechanical systems-based electrostatic field sensor using Pb(Zr,Ti)O-3 thin films 

JAPANESE JOURNAL OF APPLIED PHYSICS 47(9) 7533-7536 2008年9月  

In-plane lattice strain evaluation in piezoelectric microcantilever by two-dimensional X-ray diffraction 

JAPANESE JOURNAL OF APPLIED PHYSICS 47(9) 7537-7540 2008年9月  

Deflection of wafers and cantilevers with Pt/LNO/PZT/LNO/Pt/Ti/SiO2 multilayered structure 

THIN SOLID FILMS 516(16) 5272-5276 2008年6月  

The influence of DC bias on the displacement and sensor output of self-sensitive piezoelectric microcantilevers 

Journal of Micromechanics and Microengineering 18(3) 035025-035025 2008年2月6日  

Fabrication of piezoelectric microcantilevers using LaNiO₃buffered Pb(Zr,Ti)O₃thin film 

Journal of Micromechanics and Microengineering 18(3) 035007-035007 2008年1月21日  

Pb(Zr,Ti)O_3薄膜のウエットエッチングにおけるダメージのLaNiO_3導電性酸化物薄膜による低減 

電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(12) 559-560 2007年12月1日  

Sensing property of self-sensitive piezoelectric microcantilever utilizing Pb(Zr-0.52/Ti-0.48)O-3 thin film and LaNiO3 oxide electrode 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 46(10B) 7073-7078 2007年10月  

Influence of Pt/Ti Sputtering Temperature on the Orientation of CSD-Derived Pb(Zr_0.52Ti_0.48)O₃Thin Films 

Ferroelectrics 357(1) 233-242 2007年9月28日  

Tunable optical microscanner driven by piezoelectric actuator 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 46(9B) 6429-6432 2007年9月  

Degradation in the ferroelectric and piezoelectric properties of Pb(Zr,Ti)O₃thin films derived from a MEMS microfabrication process 

Journal of Micromechanics and Microengineering 17(7) 1238-1241 2007年6月5日  

Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb(Zr,Ti)O-3 thin film 

APPLIED PHYSICS LETTERS 90(18) 2007年4月  

Piezoelectric optical micro scanner with built-in torsion sensors 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 46(4B) 2781-2784 2007年4月  

Development of self-sensitive piezoelectric cantilever utilizing PZT thin film deposited on SOI wafer 

INTEGRATED FERROELECTRICS 89 116-122 2007年  

Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition 

Thin Solid Films 489(1-2) 74-78 2005年10月