2019年9月
Precise shape nano-replication for an antireflective imaging lens using a mould with a thermal insulation layer
MICROELECTRONIC ENGINEERING
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- 巻
- 217
- 号
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/j.mee.2019.111106
- 出版者・発行元
- ELSEVIER
A nanostructure transfer process with precise shape accuracy was investigated for application to an imaging optical lens. For a nanostructure transfer process by injection moulding, the temperature of the mould must be higher than the melting point of the polymer. Therefore, precise shape accuracy is not a sufficient specification for an imaging optical lens. Using a mould with a thermal insulation layer for the nanostructure transfer process, the temperature of the mould was evaluated to be 20 degrees C lower than that of a conventional mould because the heat energy was accumulated by the thermal insulation layer. Notably, the precise shape accuracy was 6 times that of a conventional mould. When using a mould for developing an antireflection structure, an optical lens with a transferred nanostructure exhibited low antireflection of less than 0.5% and precise shape accuracy of 0.5 mu m at a diameter of 5 mm. These specifications are sufficient for an optical imaging lens. We suggest that the mould is suitable for application to imaging lens.
- リンク情報
- ID情報
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- DOI : 10.1016/j.mee.2019.111106
- ISSN : 0167-9317
- eISSN : 1873-5568
- Web of Science ID : WOS:000489194000008