論文

査読有り
2019年9月

Precise shape nano-replication for an antireflective imaging lens using a mould with a thermal insulation layer

MICROELECTRONIC ENGINEERING
  • Kazuma Kurihara
  • ,
  • Ryohei Hokari
  • ,
  • Nobuyuki Ootsu
  • ,
  • Motoyuki Narita
  • ,
  • Koji Miyake

217
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.mee.2019.111106
出版者・発行元
ELSEVIER

A nanostructure transfer process with precise shape accuracy was investigated for application to an imaging optical lens. For a nanostructure transfer process by injection moulding, the temperature of the mould must be higher than the melting point of the polymer. Therefore, precise shape accuracy is not a sufficient specification for an imaging optical lens. Using a mould with a thermal insulation layer for the nanostructure transfer process, the temperature of the mould was evaluated to be 20 degrees C lower than that of a conventional mould because the heat energy was accumulated by the thermal insulation layer. Notably, the precise shape accuracy was 6 times that of a conventional mould. When using a mould for developing an antireflection structure, an optical lens with a transferred nanostructure exhibited low antireflection of less than 0.5% and precise shape accuracy of 0.5 mu m at a diameter of 5 mm. These specifications are sufficient for an optical imaging lens. We suggest that the mould is suitable for application to imaging lens.

リンク情報
DOI
https://doi.org/10.1016/j.mee.2019.111106
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000489194000008&DestApp=WOS_CPL
ID情報
  • DOI : 10.1016/j.mee.2019.111106
  • ISSN : 0167-9317
  • eISSN : 1873-5568
  • Web of Science ID : WOS:000489194000008

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