Patent
METHOD FOR DETERMINING ABSOLUTE VALUE OF ATOMIC VACANCY CONCENTRATION IN SILICON WAFER
- Application no.
- 特願2013-232353
- Date applied
- Nov 8, 2013
- Announcement no.
- 特開2014-168043
- Date announced
- Sep 11, 2014
- Patent/Registration no.
- 特許第6244833号
- Date registered
- Nov 24, 2017
- Date issued
- Link information
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- Research Projects
- Strongly correlated quantum phase associated with charge fluctuation