Simple closed-form expressions for efficiently calculating on-chip interconnect capacitances are presented. The formulas are expressed with second-order polynomial functions which do not include exponential functions. The runtime of the proposed formulas is about 2-10 times faster than those of existing formulas. The root mean square (RMS) errors of the proposed formulas are within 1.5%, 1.3%, 3.1%, and 4.6% of the results obtained by a field solver for structures with one line above a ground plane, one line between ground planes, three lines above a ground plane, and three lines between ground planes, respectively. The proposed formulas are also superior in accuracy to existing formulas. Copyright © 2005 The Institute of Electronics, Information and Communication Engineers.