Shigeki Matsuo

J-GLOBAL         Last updated: Oct 31, 2019 at 14:45
Shigeki Matsuo
Shibaura Institute of Technology
Department of Mechanical Engineering
Job title

Research Areas


Academic & Professional Experience

Apr 2014
Professor, Department of Mechanical Engineering, Shibaura Institute of Technology
Apr 2007
Mar 2014
Associate Professor, Institute of Technology and Science, The University of Tokushima
Jan 2002
Mar 2007
Associate Professor, Graduate School of Engineering, The University of Tokushima
Apr 1997
Dec 2001
Assistant Professor, Faculty of Engineering, The University of Tokushima
IMS fellow, Okazaki Nafional Research Institutes, Institute for Molecular Sclence

Published Papers

Reo Murakami, Hiroyuki Nakagawa, and Shigeki Matsuo
Journal of Laser Micro/Nanoengineering   12(3) 203-206   Dec 2017   [Refereed]
Haruki Hikage, Nami Nosaka, and Shigeki Matsuo
Applied Physics Express   10(11) 112701   Oct 2017   [Refereed]
Katsuyuki Hayashi and Shigeki Matsuo
Journal of Laser Micro/Nanoengineering   12(2) 141-145   Sep 2017   [Refereed]
Hiroyuki Degawa, Noriaki Urano, Shigeki Matsuo
Micromachines   8(2) 48   Jan 2017   [Refereed]
© 2017 by the authors. Miniature internal threads (tapped holes) of S0.5 were fabricated in a glass substrate. Water-assisted laser drilling was applied for fabrication of the threads of S0.5 standard using a subnanosecond laser as a light source....
Motoharu Hongo, Shigeki Matsuo
Applied Physics Express   9    Jun 2016   [Refereed]
© 2016 The Japan Society of Applied Physics. Laser-induced periodic surface structures (LIPSS) were fabricated on a prescratched silicon surface by irradiation with subnanosecond laser pulses. Low-spatial-frequency LIPSS (LSFL) were observed in th...
Xuehui Sun, Xuehui Sun, Lihe Yan, Tao Chen, Yang Yu, Shigeki Matsuo
Laser Physics   25    Jan 2015   [Refereed]
© 2015 Astro Ltd. The optical limiting (OL) properties and the mechanisms of graphene dispersions in alcohol aqueous solutions with different concentrations were investigated using a nanosecond pulse laser. With increasing the incident laser influ...
Shigeki Matsuo, Shigeki Matsuo, Shuichi Hashimoto
Optics Express   23 165-171   Jan 2015   [Refereed]
© 2015 Optical Society of America. We report spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond (fs) laser processing inside a glass substrate. The formation of the periodic patterns was critically dependent ...
Xiaofang Wang, Xiaofang Wang, Lihe Yan, Jinhai Si, Shigeki Matsuo, Huailiang Xu, Xun Hou
Applied Optics   53 8395-8399   Jan 2014   [Refereed]
© 2014 Optical Society of America We have demonstrated high-frame-rate observations of a single femtosecond laser pulse propagating in transparent medium using the optical polarigraphy technique and an echelon. The echelon produced a spatially enc...
Shigeki Matsuo, Yoshifumi Umeda, Takuro Tomita, Shuichi Hashimoto
Journal of Laser Micro/Nanoengineering   8(1) 35-38   Jan 2013   [Refereed]
In this study we examined how the laser-scanning direction during the inscription of modified lines affects to the etching rate along the lines in the femtosecond laser-assisted etching. An isotropic material (silica) was used as the sample. Circu...
Atsushi Mori, Yoshihisa Suzuki, Shigeki Matsuo Matsuo
Chemistry Letters   41 1069-1071   Nov 2012   [Refereed]
We have performed Monte Carlo simulations of hard spheres on a pattern under gravity. We found that a crystal formed at a moderate gravity strength contains essentially no defects while the one formed at a higher gravity strength contains a signif...


Koji Sugioka, Yasuyuki Tsuboi, Shigeki Matsuo
Applied Physics B: Lasers and Optics   119(3) 399   Jun 2015
Shigeki Matsuo, Keiji Oda, Yoshiki Naoi
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest      Oct 2013
Three dimensional micro removal processing was attempted to crystalline silicon substrate using a 1.56-μm subpicosecond laser. Selective removal was observed on both top and rear surfaces when nitric hydrofluoric acid was used as etchant. ? 2013 I...
T. Ohshima, M. Deki, M. Deki, T. Makino, N. Iwamoto, S. Onoda, T. Hirao, K. Kojima, T. Tomita, S. Matsuo, S. Hashimoto
AIP Conference Proceedings   1525 654-658   May 2013
Metal-Oxide-Semiconductor (MOS) capacitors fabricated on 4H silicon carbide (SiC) were irradiated with heavy ions at energies of up to 454 MeV. The currents observed through the gate oxide of the MOS capacitors were monitored under biased conditio...
Shigeki Matsuo, Kei Enjo Yoshifumi Umeda, Shuichi Hashimoto
MATEC Web of Conferences   8    Jan 2013
Femtosecond laser modification was carried out for silica substrates using spatially distorted pulses. Modified lines were inscribed in the alternative scanning directions. Etching of the sample revealed significant difference in etching rate, rep...
Manato Deki, Minoru Yamamoto, Takuto Ito, Takuro Tomita, Shigeki Matsuo, Shuichi Hashimoto, Takahiro Kitada, Toshiro Isu, Shinobu Onoda, Takeshi Ohshima
AIP Conference Proceedings   1399 Pt.A 119-120   Dec 2011
Femtosecond laser modification was used to enhance the local electrical conductivities in silicon carbide (SiC). Current-voltage (I-V) characteristics of the laser-modified regions were measured between the ion-implanted metal contacts on SiC. The...
Shigeki Matsuo
Optics InfoBase Conference Papers      Dec 2011
The Jones calculus is widely used for analyzing the polarization of a fully polarized beam. By the Jones calculus, usually, a beam having spatially homogeneous polarization is analyzed. Recently, axially symmetrically polarized beams have attracte...
Shigeki Matsuo
ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings   102 942-945   Dec 2009
The development of fs laser technology has enabled the internal modification of transparent solid materials, performed by focusing femtosecond (fs) pulses. Using internal modification and subsequent wet etching, micrometer-scale removal processing...
Hiroyuki Kawahara, Tatsuya Okada, Ryota Kumai, Takuro Tomita, Shigeki Matsuo, Shuichi Hashimoto, Makoto Yamaguchi
Materials Science Forum   600/603(Pt.2) 883-886   Jan 2009
We carried out cross-sectional transmission electron microscopy (TEM) investigation of femtosecond laser-induced ripples formed on 4H-SiC single crystal surface. Here, we paid attention to the crystal structures underlying the coarse and fine ripp...
Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa
Proceedings of SPIE - The International Society for Optical Engineering   6732 1-67320   Nov 2007
We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to a...
Takuro Tomita, Shigeki Matsuo, Tatsuya Okada, Tsunenobu Kimoto, Takeshi Mitani, Shin Ichi Nakashima
Materials Science Forum   527-529 339-342   Dec 2006
Deep-ultraviolet (DUV) micro-Raman spectroscopy was applied to study the micro structures of surface defects in a 4H-SiC homoepitaxially grown film. From DUV Raman spectrum, inclusions of 3C-SiC was found in comet defects. The shape of 3C-structur...


Graduate School, Division of Natural Science, Tohoku University
Faculty of Science, Tohoku University

Committee Memberships

Jun 2009
Journal of Laser Micro/Nanoengineering, Editor
Oct 2019
COLA2021  Committee
Aug 2018
Sep 2019
LPM2019 Program Committee
Jan 2018
Sep 2019
LAMP2019 Steering Committee
Jun 2017
Sep 2018
LPM2018 Program Committee
Jun 2016
Sep 2017
LPM2017 Program Committee
Jan 2016
Sep 2017
LPM2017 Steering Committee
Mar 2016
Nov 2016
ISOT2016 Program Committee
Jan 2014
Sep 2015
LAMP2015 Steering Committee
Jun 2013
Dec 2014
ICPEPA-9 Local Organizing Committee