2012年3月
TiN+MoS2 複合ターゲットを用いた高潤滑性スパッタ膜の創成とその密着性の改善
精密工学会誌
- ,
- 巻
- 78
- 号
- 3
- 開始ページ
- 241
- 終了ページ
- 245
- 記述言語
- 日本語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.2493/jjspe.78.241
- 出版者・発行元
- 公益社団法人 精密工学会
TiN films are superior in hardness and adhesive strength. However, friction coefficients of the TiN films are higher than those of DLC films. By adding molybdenum disulfide (MoS2) up to 40%, the TiN-MoS2 composite films with very low frictional properties could be obtained. In this study, the authors tried to reduce MoS2 content in the high lubricious TiN-MoS2 composite films by using a composite target of TiN and MoS2 for improving the hardness. In addition, Ti interlayer was deposited in order to improve the adhesive strength. The friction coefficient of the composite film with MoS2 content of 22% showed low friction coefficient which was almost equal to that of DLC film at room temperature and 200°C. The hardness of the newly developed high lubricious composite film was as high as 17GPa. In addition, the adhesive strength of the composite film was improved by forming the Ti interlayer.
- リンク情報
- ID情報
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- DOI : 10.2493/jjspe.78.241
- ISSN : 0912-0289
- ISSN : 1882-675X
- CiNii Articles ID : 130002122194
- CiNii Books ID : AN1003250X