Maki Kushimoto - My portal

Profile Information

Affiliation: Lecturer, Graduate School of Engineering Electronics 2, Nagoya University

J-GLOBAL ID: 202201015198495741
researchmap Member ID: R000040270

Research Areas

Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Electric/electronic material engineering /

Committee Memberships

Apr, 2022 - Present

機関誌企画・編集委員会, 公益社団法人応用物理学会
Oct, 2021 - Present

Symposium Program Committee, International Workshop on Nitride Semiconductors (IWN 2022)
Oct, 2021 - Present

企画委員, 一般社団法人ワイドギャップ半導体学会
2017 - Present

幹事, 応用物理学会東海支部
Aug, 2018 - Dec, 2019

実行委員, SSDM2019実行委員会
Apr, 2018 - Mar, 2019

実行委員, ISPLASMA 2019 実行委員会
Oct, 2016 - Mar, 2019

IWN2018 プログラム委員（庶務委員）, IWN2018プログラム委員会
Jan, 2018 - Dec, 2018

現地担当幹事, 第10回ナノ構造・エピタキシャル成長講演会
Sep, 2017 - Mar, 2018

実行委員, ISPLASMA 2018 実行委員会
Feb, 2017 - Mar, 2018

IWUMD 実行委員, IWUMD2017 実行委員会

Major Awards

Sep, 2020

第42回（2020年度）応用物理学会論文賞, 公益社団法人応用物理学会

張梓懿, 久志本真希, 酒井忠慶, 杉山直治, Leo J. Schowalter, 笹岡千秋, 天野浩
Jul, 2020

令和元年度赤﨑賞, 極微小深紫外半導体レーザーダイオードの実現, 国立大学法人東海国立大学機構

Papers

Structural design optimization of 279 nm wavelength AlGaN homojunction tunnel junction deep-UV light-emitting diode

Kengo Nagata, Satoshi Anada, Hiroshi Miwa, Shinichi Matsui, Shinya Boyama, Yoshiki Saito, Maki Kushimoto, Yoshio Honda, Tetsuya Takeuchi, Hiroshi Amano

Applied Physics Express, 15(4) 044003-044003, Apr 1, 2022
Sputtered polycrystalline MgZnO/Al reflective electrodes for enhanced light emission in AlGaN-based homojunction tunnel junction DUV-LED

Matsubara Taichi, Nagatat Kengo, Kushimoto Maki, Tomai Shigekazu, Katsumata Satoshi, Honda Yoshio, Amano Hiroshi

APPLIED PHYSICS EXPRESS, 15(4), Apr 1, 2022
Continuous-wave lasing of AlGaN-based ultraviolet laser diode at 274.8 nm by current injection

Zhang Ziyi, Kushimoto Maki, Yoshikawa Akira, Aoto Koji, Schowalter Leo J, Sasaoka Chiaki, Amano Hiroshi

APPLIED PHYSICS EXPRESS, 15(4), Apr 1, 2022
Visualization of depletion layer in AlGaN homojunction p–n junction

Kengo Nagata, Satoshi Anada, Yoshiki Saito, Maki Kushimoto, Yoshio Honda, Tetsuya Takeuchi, Kazuo Yamamoto, Tsukasa Hirayama, Hiroshi Amano

Applied Physics Express, 15(3) 036504-036504, Mar 1, 2022
Threshold increase and lasing inhibition due to hexagonal-pyramid-shaped hillocks in AlGaN-based DUV laser diodes on single-crystal AlN substrate

Maki Kushimoto, Ziyi Zhang, Yoshio Honda, Leo J. Schowalter, Chiaki Sasaoka, Hiroshi Amano

Japanese Journal of Applied Physics, 61(1) 010601-010601, Jan 1, 2022
Reduction in operating voltage of AlGaN homojunction tunnel junction deep-UV light-emitting diodes by controlling impurity concentrations

Kengo Nagata, Hiroaki Makino, Hiroshi Miwa, Shinichi Matsui, Shinya Boyama, Yoshiki Saito, Maki Kushimoto, Yoshio Honda, Tetsuya Takeuchi, Hiroshi Amano

Applied Physics Express, 14(8) 084001-084001, Aug 1, 2021
Improving light output power of AlGaN-based deep-ultraviolet light-emitting diodes by optimizing the optical thickness of p-layers

Yusuke Matsukura, Tetsuhiko Inazu, Cyril Pernot, Naoki Shibata, Maki Kushimoto, Manato Deki, Yoshio Honda, Hiroshi Amano

Applied Physics Express, 14(8) 084004-084004, Aug 1, 2021
Impact of heat treatment process on threshold current density in AlGaN-based deep-ultraviolet laser diodes on AlN substrate

Maki Kushimoto, Ziyi Zhang, Naoharu Sugiyama, Yoshio Honda, Leo J. Schowalter, Chiaki Sasaoka, Hiroshi Amano

Applied Physics Express, 14(5) 051003-051003, May 1, 2021
Decrease in the injection efficiency and generation of midgap states in UV-C LEDs: a model based on rate equations

F. Piva, C. De Santi, M. Buffolo, M. Deki, M. Kushimoto, H. Amano, H. Tomozawa, N. Shibata, G. Meneghesso, E. Zanoni, M. Meneghini

Proc. SPIE, 11686 116860, Mar 5, 2021 Invited
Development of UV-C laser diodes on AlN substrate

Maki Kushimoto, Ziyi Zhang, Naoharu Sugiyama, Yoshio Honda, Leo J. Schowalter, Chiaki Sasaoka, Hiroshi Amano

Proc. SPIE, 11686 116860P, Mar 5, 2021 InvitedLead author
Modeling the degradation mechanisms of AlGaN-based UV-C LEDs: from injection efficiency to mid-gap state generation

Piva F, De Santi C, Deki M, Kushimoto M, Amano H, Tomozawa H, Shibata N, Meneghesso G, Zanoni E, Meneghini M

PHOTONICS RESEARCH, 8(11) 1786-1791, Nov, 2020 Peer-reviewed
AlN 基板上 AlGaN ヘテロ構造 UVC レーザーダイオード

久志本真希

日本結晶成長学会誌, 47(3) 47-3-03, Oct 30, 2020 Peer-reviewedInvitedLead author
Space charge profile study of AlGaN-based p-type distributed polarization doped claddings without impurity doping for UV-C laser diodes

Zhang Ziyi, Kushimoto Maki, Horita Masahiro, Sugiyama Naoharu, Schowalter Leo J, Sasaoka Chiaki, Amano Hiroshi

APPLIED PHYSICS LETTERS, 117(15), Oct 12, 2020 Peer-reviewed
Design and characterization of a low-optical-loss UV-C laser diode

Zhang Ziyi, Kushimoto Maki, Sakai Tadayoshi, Sugiyama Naoharu, Schowalter Leo J, Sasaoka Chiaki, Amano Hiroshi

JAPANESE JOURNAL OF APPLIED PHYSICS, 59(9) ., Sep 1, 2020 Peer-reviewed
Dielectric Ruduced Surface Field Effect on Vertical GaN-on-GaN Nanowire Schottky Barrier Diodes

Liao Yaqiang, Chen Tao, Wang Jia, Ando Yuto, Yang Xu, Watanabe Hirotaka, Hirotani Jun, Kushimoto Maki, Deki Manato, Tanaka Atsushi, Nitta Shugo, Honda Yoshio, Chen Kevin J, Amano Hiroshi

PROCEEDINGS OF THE 2020 32ND INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD 2020), 349-352, Aug 18, 2020 Peer-reviewed
Impact of high-temperature implantation of Mg ions into GaN

Takahashi Masahiro, Tanaka Atsushi, Ando Yuto, Watanabe Hirotaka, Deki Manato, Kushimoto Maki, Nitta Shugo, Honda Yoshio, Shima Kohei, Kojima Kazunobu, Chichibu Shigefusa F, Amano Hiroshi

JAPANESE JOURNAL OF APPLIED PHYSICS, 59(5) ., May 1, 2020 Peer-reviewed
Experimental observation of high intrinsic thermal conductivity of AlN

Cheng Zhe, Koh Yee Rui, Mamun Abdullah, Shi Jingjing, Bai Tingyu, Huynh Kenny, Yates Luke, Liu Zeyu, Li Ruiyang, Lee Eungkyu, Liao Michael E, Wang Yekan, Yu Hsuan Ming, Kushimoto Maki, Luo Tengfei, Goorsky Mark S, Hopkins Patrick E, Amano Hiroshi, Khan Asif, Graham Samuel

PHYSICAL REVIEW MATERIALS, 4(4), Apr 23, 2020 Peer-reviewed
On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR

Sakai Tadayoshi, Kushimoto Maki, Zhang Ziyi, Sugiyama Naoharu, Schowalter Leo J, Honda Yoshio, Sasaoka Chiaki, Amano Hiroshi

APPLIED PHYSICS LETTERS, 116(12), Mar 23, 2020
Role of defects in the mid-term degradation of UV-B LEDs investigated by optical and DLTS measurements

Piva F, De Santi C, Deki M, Kushimoto M, Amano H, Tomozawa H, Shibata N, Meneghesso G, Zanoni E, Meneghini M

GALLIUM NITRIDE MATERIALS AND DEVICES XV, 11280, Feb, 2020
Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by Radio Frequency Magnetron Sputtering

Kushimoto Maki, Sakai Tadayoshi, Ueoka Yoshihiro, Tomai Shigekazu, Katsumata Satoshi, Deki Manato, Honda Yoshio, Amano Hiroshi

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, Jan 29, 2020

Presentations

113

Development of high efficiency AlGaN tunnel junction deep-UV LEDs

Kengo Nagata, Taichi Matsubara, Maki Kushimoto, Yoshiki Saito, Yoshio Honda, Tetsuya Takeuchi, Hiroshi Amano

13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 14th International Conference on Plasma-Nano Technology & Sciense(ISPlasma2022 / IC-PLANTS2022), Mar 10, 2022 Invited
多光子励起OBICを用いたGaN縦型p-nダイオード駆動中におけるキャリア濃度分布測定手法の提案

八木誠, 川崎晟也, 隈部岳瑠, 安藤悠人, 田中敦之, 出来真斗, 久志本真希, 新田州吾, 本田善央, 天野浩

第69回応用物理学会春季学術講演会, Feb 23, 2022
MOVPE法を用いたGaN/AlN共鳴トンネルダイオードの作製

岩田大暉, 隈部岳瑠, 渡邉浩崇, 久志本真希, 出来真斗, 新田州吾, 田中敦之, 本田善央, 天野浩

第69回応用物理学会春季学術講演会, Feb 22, 2022
Emission uniformity of UVC laser diodes on AlN substrates

Maki Kushimoto, Ziyi Zhang, Leo Schowalter, Yoshio Honda, Chiaki Sasaoka, Hiroshi Amano

SPIE Photonics West 2022, Feb 21, 2022 Invited
AlN基板上UV-C レーザーダイオード

久志本真希, 張梓懿, 本田善央, レオショーワルター, 笹岡千秋, 天野浩

一般社団法人レーザー学会学術講演会第42回年次大会, Jan 14, 2022
UV-C LDs fabricated on AlN Substrates

Maki Kushimoto, Ziyi Zhang, Leo Schowalter, Yoshio Honda, Chiaki Sasaoka, Hiroshi Amano

The 3rd International Workshop on Materials Science and Advanced Electronics Created by Singularity, Jan 12, 2022 Invited
最短波長UVC-LD の実現とその周辺技術

久志本真希, 張梓懿, 本田善央, レオショーワルター, 笹岡千秋, 天野浩

一般社団法人ワイドギャップ半導体学会第4回研究会, Dec 10, 2021 Invited
Sputtered polycrystalline MgZnO as transparent electrode in AlGaN-based homojunction tunnel junction deep-ultraviolet light-emitting diode for significant emission enhancement

Taichi Matsubara, Kengo Nagata, Maki Kushimoto, Yoshio Honda, Hiroshi Amano

International Conference on Materials and Systems for Sustainability 2021(ICMaSS2021), Nov 6, 2021
Reduction of operating voltage of AlGaN homo junction tunnel junction deep UV light emitting diode by controlling impurity concentrations

Kengo Nagata, Hiroaki Makino, Hiroshi Miwa, Shinichi Matsui, Shinya Boyama, Yoshiki Saito, Maki Kushimoto, Yoshio Honda, Tetsuya Takeuchi, Hiroshi Amano

International Conference on Materials and Systems for Sustainability 2021(ICMaSS2021), Nov 6, 2021
Reducing the Threshold Current Density of Deep UV LDs on AlN Substrate

Maki Kushimoto, Ziyi Zhang, Yoshio Honda, Leo Schowalter, Chiaki Sasaoka, Hiroshi Amano

The IEEE Photonics Conference (IPC 2021), Oct 20, 2021 Invited
AlN基板上UV-C LDのプロセス起因劣化

笹岡千秋, 久志本真希, 張梓懿, 天野浩

日本学術振興会「結晶加工と評価技術」第145 委員会第172 回研究会, Oct 1, 2021 Invited
深紫外LEDの発光出力向上に向けた多結晶スパッタリングMgZnO透明電極

松原太一, 永田賢吾, 久志本真希, 本田善央, 天野浩

第82回応用物理学会秋季学術講演会, Sep 12, 2021
AlGaNホモ接合トンネルジャンクション深紫外 LED の低電圧駆動（2）

永田賢吾, 三輪浩士, 松井慎一, 坊山晋也, 齋藤義樹, 久志本真希, 本田善央, 竹内哲也, 天野浩

第82回応用物理学会秋季学術講演会, Sep 12, 2021
電子線ホログラフィーを用いたAlGaNホモ接合トンネルジャンクションの電位分布解析

永田賢吾, 穴田智史, 齋藤義樹, 久志本真希, 本田善央, 竹内哲也, 天野浩, 山本和生, 平山司

第82回応用物理学会秋季学術講演会, Sep 12, 2021
Development of UV-C laser diode on AlN substrate using distributed polarization doped p-side cladding layer

Chiaki Sasaoka, Ziyi Zhang, Maki Kushimoto, Leo J. Schowalter, Hiroshi Amano

Lester Eastman Conference on High Performance Devices ( LEC 2021), Aug 4, 2021 Invited
Deep UV Laser Diode with Compositionally Graded AlGaN p-cladding Layer

Maki Kushimoto, Ziyi Zhang, Naoharu Sugiyama, Yoshio Honda, Leo J. Schowalter, Chiaki Sasaoka, Hiroshi Amano

CLEO 2021, May 12, 2021 Invited
UV-C laser diode with distributed polarization doped p-cladding layer

M. Kushimoto, Z. Zhang, T. Sakai, N. Sugiyama, Y. Honda, L. J. Schowalter, C. Sasaoka, H. Amano

2021 MRS Spring Meeting, Apr 18, 2021 Invited
Development of polarization doped UVC LDs on AlN substrates

M. Kushimoto, Z. Zhang, T. Sakai, N. Sugiyama, Y. Honda, L. J. Schowalter, C. Sasaoka, H. Amano

CSW-2021, May 13, 2021 Invited
高温スパッタリングにより成膜したMgZnO透明電極材料の電気的及び光学的特性

松原太一, 久志本真希, 渡邉浩崇, 古澤優太, 新田州吾, 本田善央, 天野浩

第68回応用物理学会春季学術講演会, Mar 18, 2021
AlGaNホモ接合トンネルジャンクション深紫外LEDの低電圧駆動

永田賢吾, 牧野浩明, 三輪浩士, 松井慎一, 坊山晋也, 齋藤義樹, 久志本真希, 本田善央, 竹内哲也, 天野浩

第68回応用物理学会春季学術講演会, Mar 16, 2021

Teaching Experience

2020 - 2020

Automobile Engineering Laboratory I (Nagoya University)
2020 - 2020

電気電子情報工学実験第１ (名古屋大学)
2020 - 2020

電気電子情報工学実験第２ (名古屋大学)
2019 - 2019

Automobile Engineering Laboratory I (Nagoya University)
2019 - 2019

線形回路論及び演習 (名古屋大学)
2019 - 2019

電気電子情報工学実験第１ (名古屋大学)
2018 - 2018

Automobile Engineering Laboratory I (Nagoya University)
2018 - 2018

線形回路論及び演習 (名古屋大学)
2018 - 2018

電気電子情報工学実験第１ (名古屋大学)
2017 - 2017

Automobile Engineering Laboratory I (Nagoya University)
2017 - 2017

線形回路論及び演習 (名古屋大学)
2017 - 2017

物理学実験 (名古屋大学)
2017 - 2017

電気電子情報工学実験第１ (名古屋大学)

Research Projects

Output power improvement of microchip deep-ultraviolet laser diodes for innovative manufacturing systems

Grants-in-Aid for Scientific Research, Apr, 2021 - Mar, 2026
Fabrication of long-wavelength light-emitting devices using semipolar InGaN

Apr, 2017 - Mar, 2020

Kushimoto Maki
半極性面窒化物半導体を用いた発光デバイスに関する研究

科学研究費補助金, Apr, 2014 - Mar, 2016