Makoto Mita

Out-of-plane polysilicon actuator with a smooth vertical mirror for optical fiber switch application

Makoto Mita, Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita

LEOS Summer Topical Meeting, 33-34, 1998

Micromechanical tunneling probes & actuators on a silicon chip

Hiroshi Toshiyoshi, Makoto Mita, Masahide Goto, Gen Hashiguchi, Hiroyuki Fujita, Dai Kobayashi, Junji Endo, Yasuo Wada

1999 International Microprocesses and Nanotechnology Conference, 180-181, 1999 Peer-reviewed

Micromachined tunneling current device for the direct observation of the tunneling gap

Hiroyuki Fujita, Gen Hashiguchi, Makoto Mita, Hiroshi Toshiyoshi, Dai Kobayashi, Masahide Goto, Yasuo Wada, Junji Endo

IEEE Symposium on Emerging Technologies and Factory Automation, ETFA, 1 367-372, 1999

Delay-Masking Process for Silicon Three-Dimensional Bulk Structures

MITA Makoto, MITA Yoshio, TOSHIYOSHI Hiroshi, FUJITA Hiroyuki

IEEJ Transactions on Sensors and Micromachines, 119(5) 310-311, May, 1999 Peer-reviewed

A digital-to-analog converter of displacement by an integrated micromechanism

H Toshiyoshi, D Kobayashi, M Mita, G Hashiguchi, H Fujita, J Endo, Y Wada

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 38(5B) L593-L595, May, 1999

StepMotion Actuators by Silicon Micromachining

Toshiyoshi Hiroshi, Kobayashi Dai, Mita Makoto, Hashiguchi Gen, Fujita Hiroyuki, Endo Junji, Wada Yasuo

Monthly journal of the Institute of Industrial Science, University of Tokyo, 51(8) 647-650, Aug, 1999

Fabrication of micromechanical tunneling probes and actuators on a silicon chip

H Toshiyoshi, M Goto, M Mita, H Fujita, D Kobayashi, G Hashiguchi, J Endo, Y Wada

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 38(12B) 7185-7189, Dec, 1999

Fabrication of an Inverted Scratch-Drive-Actuator for a Pwerful and Precise Conveyance System

MITA Yoshio, COLLARD Dominique, MITA Makoto, FUJITA Hiroyuki

The Journal of the Institute of Electrical Engineers of Japan, 119(12) 648-649, Dec 1, 1999

Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers

Makoto Mita, Yoshio Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita

IEEJ Transactions on Sensors and Micromachines, 120(11) 493-497, 2000 Peer-reviewedLead author

Embedded-mask-methods for mm-scale multi-layer vertical/slanted Si structures

Yoshio Mita, Makoto Mita, Agnes Tixier, Jean Philippe Gouy, Hiroyuki Fujita

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 300-305, 2000

Self aligned vertical mirrors and V-grooves applied to a self-latching matrix switch for optical networks

Philippe Helin, Makoto Mita, Hiroyuki Fujita

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 467-472, 2000

Self-aligned mirror and V-grooves in free-space micromachined optical switches

P Helin, M Mita, H Fujita

ELECTRONICS LETTERS, 36(6) 563-564, Mar, 2000 Peer-reviewed

Microelectromechanical digital-to-analog converters of displacement for step motion actuators

H Toshiyoshi, D Kobayashi, M Mita, G Hashiguchi, H Fujita, J Endo, Y Wada

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 9(2) 218-225, Jun, 2000 Peer-reviewed

A Silicon Shadow Mask with Unlimited Patterns and a Mechanical Alignment Structure by Al-Delay Masking Process

MITA Yoshio, TIXER Agnes, OSHIMA Satoshi, MITA Makoto, GOUY Jean-philippe, FUJITA Hiroyuki

The Journal of the Institute of Electrical Engineers of Japan, 120(7) 357-362, Jul 1, 2000

Micromachined tools for nano technology-twin nano-probes and nano-scale gap control by integrated microactuators

K Kakushima, M Mita, D Kobayashi, G Hashiguchi, J Endo, Y Wada, H Fujita

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 294-297, 2001 Peer-reviewed

Characterization of bulk micromachined tunneling tip integrated with positioning actuator

M Mita, H Toshiyoshi, K Kakushima, G Hashiguchi, D Kobayashi, J Endo, Y Wada, H Fujita

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 352-355, 2002 Peer-reviewed

Electrostatic piggyback microactuators for head element positioning

M. Mita, H. Toshiyoshi, H. Fujita

Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002, 2002 Peer-reviewed

Micro-hole Fubrication using a Silicon-mold

YASUI Manabu, KAKUSHIMA Kuniyuki, HIRABAYASHI Yasuo, MITA Makoto, FUJITA Hiroyuki

IEEJ Transactions on Sensors and Micromachines, 122(8) 415-416, Aug 1, 2002

A MEMS piggyback actuator for hard-disk drives

H Toshiyoshi, M Mita, H Fujita

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 11(6) 648-654, Dec, 2002

A Micromachined Impact Microactuator Driven by Electrostatic Force

MITA M.

J. Microelectromech. Syst., 12(1) 37-41, 2003 Lead author

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