Cell manipulation system is an essential tool for reconstruction of cellular microenvironment that leads to high-throughput function analysis. Our aim is the development of dielectrophoretic probe array for non-invasive and massively parallel manipulation of single cells. In this paper, we report fabrication of pairs of polymer pillars and formation of a sacrifice layer for three-dimensional electrodes. On dielectric-covered electrodes, dielectrophoretic forces were generated by the application of AC voltage. Cells were captured on the electrodes in a parallel manner. Dielectrophoretic manipulation with coated-electrodes provides a way to manipulate cells non-invasively.