A nano porous polyethersulfone (PES) membrane is widely used for aspects of nanofiltration, such as purification, fractionation and dialysis. However, the low-blood-compatibility characteristic of PES membrane causes platelets and blood cells to stick to the surface of the membrane and degrades ions diffusion through membrane, which further limits its application for dialysis systems. In this study, we deposited the fluorinated-diamond-like-carbon (F-DLC) onto the finger like structure layer of the PES membrane. By doing this, we have the F-DLC films coating the membrane surface without sacrificing the membrane permeability. In addition, we examined antithrombogenicity of the F-DLC/PES membranes using a microfluidic device, and experimentally found that F-DLC drastically reduced the amount of blood cells attached to the surface. We have also conducted long-term experiments for 24 days and the diffusion characteristics were found to be deteriorated due to fouling without any surface modification. On the other hand, the membranes coated by F-DLC film gave a consistent diffusion coefficient of ions transfer through a membrane porous. Therefore, F-DLC films can be a great candidate to improve the antithrombogenic characteristics of the membrane surfaces in hemodialysis systems. © 2013 by the authors.