MISC

2015年

30am2-PN-28 マイクロ流体用光駆動マイクロモータの製作および性能評価

マイクロ・ナノ工学シンポジウム
  • 小林 亮介
  • ,
  • 伊藤 淳史
  • ,
  • 山田 昇
  • ,
  • 中山 忠親
  • ,
  • 高橋 勉

2015
0
開始ページ
_30am2
終了ページ
PN--_30am2-PN-
記述言語
日本語
掲載種別
DOI
10.1299/jsmemnm.2015.7._30am2-PN-_14
出版者・発行元
一般社団法人 日本機械学会

In this study, the light-driven micromotors with different blade angles are fabricated by two-photon absorption laser lithography. Optical torque is caused by momentum change when the incident light is refracted at motor blades. The blade shape of the present micromotors is triangle shape and the blade angle is set as approximately 24°, 42° and 61°. Laser light is irradiated to the micromotor and the effect of the blade angle on the micromotor's rotation speed is investigated. In the beam concentration unit, the micromotor in acetone is placed on the stage of an inverted microscope. A 200 mW laser with 532 nm wavelength is used as the power source. As the result, the rotation speed becomes faster as the blade angle increase.

リンク情報
DOI
https://doi.org/10.1299/jsmemnm.2015.7._30am2-PN-_14
J-GLOBAL
https://jglobal.jst.go.jp/detail?JGLOBAL_ID=201602222568111169
CiNii Articles
http://ci.nii.ac.jp/naid/110010046042
CiNii Books
http://ci.nii.ac.jp/ncid/AA12456946
ID情報
  • DOI : 10.1299/jsmemnm.2015.7._30am2-PN-_14
  • ISSN : 2432-9495
  • J-Global ID : 201602222568111169
  • CiNii Articles ID : 110010046042
  • CiNii Books ID : AA12456946

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