2015年
30am2-PN-28 マイクロ流体用光駆動マイクロモータの製作および性能評価
マイクロ・ナノ工学シンポジウム
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- 巻
- 2015
- 号
- 0
- 開始ページ
- _30am2
- 終了ページ
- PN--_30am2-PN-
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.1299/jsmemnm.2015.7._30am2-PN-_14
- 出版者・発行元
- 一般社団法人 日本機械学会
In this study, the light-driven micromotors with different blade angles are fabricated by two-photon absorption laser lithography. Optical torque is caused by momentum change when the incident light is refracted at motor blades. The blade shape of the present micromotors is triangle shape and the blade angle is set as approximately 24°, 42° and 61°. Laser light is irradiated to the micromotor and the effect of the blade angle on the micromotor's rotation speed is investigated. In the beam concentration unit, the micromotor in acetone is placed on the stage of an inverted microscope. A 200 mW laser with 532 nm wavelength is used as the power source. As the result, the rotation speed becomes faster as the blade angle increase.
- リンク情報
- ID情報
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- DOI : 10.1299/jsmemnm.2015.7._30am2-PN-_14
- ISSN : 2432-9495
- J-Global ID : 201602222568111169
- CiNii Articles ID : 110010046042
- CiNii Books ID : AA12456946