We demonstrated that our previously developed gas-phase fluoroalkylsilane patterning method was applicable to polydimethylsiloxane (PDMS) and we compared the stability of patterned proteins and cultured cells between PDMS and glass surfaces. The shapes of the protein patterns were stable on both glass and PDMS surfaces for more than I week. The cell patterns were stable on glass surfaces for I week, while those on PDMS collapsed within a few days. These results indicated that our method was applicable to PDMS, although, compared with glass, PDMS has an unsolved issue for its application to long-term patterning of cells.