1989年2月20日
Integrated Optic Accelerometer Employing a Cantilever on a Silicon Substrate
Jpn J Appl Phys
- ,
- ,
- 巻
- 28
- 号
- 2
- 開始ページ
- 287
- 終了ページ
- 288
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1143/JJAP.28.287
- 出版者・発行元
- INSTITUTE OF PURE AND APPLIED PHYSICS
A novel integrated optic accelerometer employing a cantilever on a silicon substrate is proposed. An analysis is carried out to demonstrate the feasibility of the proposed sensor and obtain the basic design concept. The sensitivity and the detectable frequency range of the acceleration can be set by proper selection of the cantilever dimensions and the added weight.
- リンク情報
- ID情報
-
- DOI : 10.1143/JJAP.28.287
- ISSN : 0021-4922
- CiNii Articles ID : 150000022933