論文

2018年4月28日

Double negatively charged carbon vacancy at the h- and k-sites in 4H-SiC: Combined Laplace-DLTS and DFT study

Journal of Applied Physics
  • Ivana Capan
  • Tomislav Brodar
  • Zeljko Pastuović
  • Rainer Siegele
  • Takeshi Ohshima
  • Shin-Ichiro Sato
  • Takahiro Makino
  • Luka Snoj
  • Vladimir Radulović
  • José Coutinho
  • Vitor J. B. Torres
  • Kamel Demmouche
  • 全て表示

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記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1063/1.5011124
出版者・発行元
American Institute of Physics Inc.

We present results from combined Laplace-Deep Level Transient Spectroscopy (Laplace-DLTS) and density functional theory studies of the carbon vacancy (VC) in n-type 4H-SiC. Using Laplace-DLTS, we were able to distinguish two previously unresolved sub-lattice-inequivalent emissions, causing the broad Z1/2 peak at 290 K that is commonly observed by conventional DLTS in n-type 4H-SiC. This peak has two components with activation energies for electron emission of 0.58 eV and 0.65 eV. We compared these results with the acceptor levels of VC obtained by means of hybrid density functional supercell calculations. The calculations support the assignment of the Z1/2 signal to a superposition of emission peaks from double negatively charged VC defects. Taking into account the measured and calculated energy levels, the calculated relative stability of VC in hexagonal (h) and cubic (k) lattice sites, as well as the observed relative amplitude of the Laplace-DLTS peaks, we assign Z1 and Z2 to VC(h) and VC(k), respectively. We also present the preliminary results of DLTS and Laplace-DLTS measurements on deep level defects (ET1 and ET2) introduced by fast neutron irradiation and He ion implantation in 4H-SiC. The origin of ET1 and ET2 is still unclear.

リンク情報
DOI
https://doi.org/10.1063/1.5011124
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85042229849&origin=inward
ID情報
  • DOI : 10.1063/1.5011124
  • ISSN : 1089-7550
  • ISSN : 0021-8979
  • SCOPUS ID : 85042229849

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