Free electron laser (FEL) technology for short wavelengths is reviewed. Key issues of short-wavelength FEL are i) to make a high energy beam in SR, ii ) to obtain a high bright beam onan RF linac, iii) to enhance a high harmonic gain, iv) to develop a microwiggler and a la ser wiggler, and v) to develop optics. These issuls are discussed briefly and an example of industrial applications in short wavelength region as a lithography is noted.