1998年
Properties of C and CN films prepared by mass-separated hyper-thermal carbon and nitrogen ions
ATOMISTIC MECHANISMS IN BEAM SYNTHESIS AND IRRADIATION OF MATERIALS
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- 巻
- 504
- 号
- 開始ページ
- 307
- 終了ページ
- 312
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- 出版者・発行元
- MATERIALS RESEARCH SOCIETY
Amorphous carbon films and CN films were prepared by ion beam deposition using isotopically mass-separated, hyper-thermal (50-400eV) ion species such as C-12(2)-, (CN-)-C-12-N-14 or simultaneous C-12(2)- and N-14(+) under high vacuum condition. Film properties such as structures, bonding states, compositions, etc, were investigated. The optical band gaps of amorphous carbon films deposited by using C-12(2)- ions or CN films deposited by using (CN-)-C-12-N-14 ions were estimated from optical constants. The gaps were about 2.3eV for the amorphous carbon films and about 0.8 eV for the CN films. Energy dependence of optical constants of CN films formed by simultaneous deposition of C-2(-) and N+ was investigated. The refractive index (n) and extinction coefficient (k) at lambda = 675nm increased 1.5 to 2.4 and 0.3 to 1.3, respectively, with increasing N+ kinetic energy. The relations between bonding states and kinetic energy of hyper-thermal ions are discussed.
- リンク情報
- ID情報
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- ISSN : 0272-9172
- Web of Science ID : WOS:000079427800046