2018年10月30日
金属基材薄膜センサ素子用塗布型粘土絶縁膜
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
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- 巻
- 35
- 号
- 7
- 開始ページ
- 6p
- 終了ページ
- 208
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.1541/ieejsmas.139.201
- 出版者・発行元
- Institute of Electrical Engineers of Japan
<p>A coating type clay insulating layer was successfully fabricated on a stainless steel surface by dip coating of an aqueous paste of hectorite clay followed by calcination at 600℃. A surface roughness and electrical characteristics of the clay layer were evaluated. Cr-N thin film strain sensors on the clay insulating layer and stainless steel substrate were fabricated and the output properties of them were investigated. It is considered that the clay layer is expected as a candidate of lower-cost insulating materials.</p>
- リンク情報
- ID情報
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- DOI : 10.1541/ieejsmas.139.201
- ISSN : 1341-8939
- CiNii Articles ID : 40021974924
- CiNii Books ID : AN1052634X