Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2x10(-4) Pa 1 s(-1). The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 run. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)(5). Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostructure body and the whole was likely to be one "nano-magnet".