The authors report the resonance frequency and the energy dissipation of single crystal diamond cantilevers with different dimensions, which were fabricated by ion implantation assisted technique. The resonance frequency well followed the inverse power law relationship with the length of the cantilevers and exhibited a high reproducibility with varying the dimensions. The energy dissipation decreased with increasing the cantilever length and saturated or reduced at a certain value. For the shorter cantilevers, clamping loss governed the energy dissipation. As the cantilever length increased to a certain value, defects relaxation or surface effect became dominant. The possible origins for these energy dissipations were discussed. (C) 2014 AIP Publishing LLC.