論文

査読有り
2018年12月1日

Autonomous robotic searching and assembly of two-dimensional crystals to build van der Waals superlattices

Nature Communications
  • Satoru Masubuchi
  • ,
  • Masataka Morimoto
  • ,
  • Sei Morikawa
  • ,
  • Momoko Onodera
  • ,
  • Yuta Asakawa
  • ,
  • Kenji Watanabe
  • ,
  • Takashi Taniguchi
  • ,
  • Tomoki Machida

9
1
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1038/s41467-018-03723-w
出版者・発行元
Nature Publishing Group

Van der Waals heterostructures are comprised of stacked atomically thin two-dimensional crystals and serve as novel materials providing unprecedented properties. However, the random natures in positions and shapes of exfoliated two-dimensional crystals have required the repetitive manual tasks of optical microscopy-based searching and mechanical transferring, thereby severely limiting the complexity of heterostructures. To solve the problem, here we develop a robotic system that searches exfoliated two-dimensional crystals and assembles them into superlattices inside the glovebox. The system can autonomously detect 400 monolayer graphene flakes per hour with a small error rate (&lt
7%) and stack four cycles of the designated two-dimensional crystals per hour with few minutes of human intervention for each stack cycle. The system enabled fabrication of the superlattice consisting of 29 alternating layers of the graphene and the hexagonal boron nitride. This capacity provides a scalable approach for prototyping a variety of van der Waals superlattices.

リンク情報
DOI
https://doi.org/10.1038/s41467-018-03723-w
URL
http://orcid.org/0000-0003-3701-8119
ID情報
  • DOI : 10.1038/s41467-018-03723-w
  • ISSN : 2041-1723
  • ORCIDのPut Code : 43517466
  • SCOPUS ID : 85045525659

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