2017年11月19日
Hybrid ultra thin silicon and electro-optic polymer waveguide modulator
22nd Microoptics Conference, MOC 2017
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© 2017 The Japan Society of Applied Physics. Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.
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