Using a low temperature x-ray diffractometer, we studied superconductivity materials, optimally doped and underdoped YBCOs and PrOs(4)Sb(12) between 0.1 K and 300 K. At several temperatures, whole profiles of the x-ray reflection peak were measured and refined by Rietveld analysis. By Rietveld analysis, we found that Pr atoms in PrOs(4)Sb(12) are still oscillating at an amplitude of about 0.1 angstrom at 0.18 K. For some reflection planes, x-ray diffraction measurement with a small step size and a long stepping time was performed to accumulate more counts at certain temperatures. The lattice constant d of optimally doped YBCO (OPT YBCO) shows anomalous behaviours at around the superconductivity transition temperature Tc and around spin gap temperature T*. In OPT YBCO, the intensity of the reflection spectrum shows a clear anomaly at around Tc.