論文

査読有り
2017年3月

Influence of Fabrication Processes and Annealing Treatment on the Minority Carrier Lifetime of Silicon Nanowire Films

NANOSCALE RESEARCH LETTERS
  • Shinya Kato
  • ,
  • Tatsuya Yamazaki
  • ,
  • Yasuyoshi Kurokawa
  • ,
  • Shinsuke Miyajima
  • ,
  • Makoto Konagai

12
242
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1186/s11671-017-2006-z
出版者・発行元
SPRINGER

Surface passivation and bulk carrier lifetime of silicon nanowires (SiNWs) are essential for their application in solar cell devices. The effective minority carrier lifetime of a semiconductor material is influenced by both its surface passivation and bulk carrier lifetime. We found that the effective carrier lifetime of SiNWs passivated with aluminum oxide (Al2O3) was significantly influenced by the fabrication process of SiNWs. We could not measure the effective lifetime of SiNWs fabricated by thermal annealing of amorphous silicon nanowires. Nevertheless, the SiNWs fabricated by metal-assisted chemical etching of polycrystalline silicon displayed an effective lifetime of 2.86 mu s. Thermal annealing of SiNWs at 400 degrees C in a forming gas improved the effective carrier lifetime from 2.86 to 15.9 mu s because of the improvement in surface passivation at the interface between the SiNWs and Al2O3 layers.

リンク情報
DOI
https://doi.org/10.1186/s11671-017-2006-z
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000397777200009&DestApp=WOS_CPL
ID情報
  • DOI : 10.1186/s11671-017-2006-z
  • ISSN : 1556-276X
  • Web of Science ID : WOS:000397777200009

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