論文

査読有り
2017年5月

Vacuum Annealing and Passivation of HfS2 FET for Mitigation of Atmospheric Degradation

IEICE TRANSACTIONS ON ELECTRONICS
  • Vikrant Upadhyaya
  • ,
  • Toru Kanazawa
  • ,
  • Yasuyuki Miyamoto

E100C
5
開始ページ
453
終了ページ
457
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1587/transele.E100.C.453
出版者・発行元
IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG

The performance of devices based on two dimensional (2D) materials is significantly affected upon prolonged exposure to atmosphere. We analyzed time based environmental degradation of electrical properties of HfS2 field effect transistors. Atmospheric entities like oxygen and moisture adversely affect the device surface and reduction in drain current is observed over period of 48 hours. Two corrective measures, namely, PMMA passivation and vacuum annealing, have been studied to address the diminution of current by contaminants. PMMA passivation prevents the device from environment and reduces the effect of Coulomb scattering. Improvement in current characteristics signifies the importance of dielectric passivation for 2D materials. On the other hand, vacuum annealing is useful in removing contaminants from the affected surface. In order to figure out optimum process conditions, properties have been studied at various annealing temperatures. The improvement in drain current level was observed upon vacuum annealing within optimum range of annealing temperature.

リンク情報
DOI
https://doi.org/10.1587/transele.E100.C.453
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000400678600007&DestApp=WOS_CPL
ID情報
  • DOI : 10.1587/transele.E100.C.453
  • ISSN : 1745-1353
  • Web of Science ID : WOS:000400678600007

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