Sep, 1991
DOUBLE SINUSOIDAL PHASE-MODULATING LASER DIODE INTERFEROMETER FOR DISTANCE MEASUREMENT
APPLIED OPTICS
- ,
- ,
- Volume
- 30
- Number
- 25
- First page
- 3617
- Last page
- 3621
- Language
- English
- Publishing type
- Research paper (scientific journal)
- DOI
- 10.1364/AO.30.003617
- Publisher
- OPTICAL SOC AMER
Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of approximately 0.5-mu-m.
- Link information
- ID information
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- DOI : 10.1364/AO.30.003617
- ISSN : 0003-6935
- Web of Science ID : WOS:A1991GE64100012