Papers

Peer-reviewed
Sep, 1991

DOUBLE SINUSOIDAL PHASE-MODULATING LASER DIODE INTERFEROMETER FOR DISTANCE MEASUREMENT

APPLIED OPTICS
  • O SASAKI
  • ,
  • T YOSHIDA
  • ,
  • T SUZUKI

Volume
30
Number
25
First page
3617
Last page
3621
Language
English
Publishing type
Research paper (scientific journal)
DOI
10.1364/AO.30.003617
Publisher
OPTICAL SOC AMER

Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of approximately 0.5-mu-m.

Link information
DOI
https://doi.org/10.1364/AO.30.003617
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:A1991GE64100012&DestApp=WOS_CPL
ID information
  • DOI : 10.1364/AO.30.003617
  • ISSN : 0003-6935
  • Web of Science ID : WOS:A1991GE64100012

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