論文

査読有り
1991年9月

DOUBLE SINUSOIDAL PHASE-MODULATING LASER DIODE INTERFEROMETER FOR DISTANCE MEASUREMENT

APPLIED OPTICS
  • O SASAKI
  • ,
  • T YOSHIDA
  • ,
  • T SUZUKI

30
25
開始ページ
3617
終了ページ
3621
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1364/AO.30.003617
出版者・発行元
OPTICAL SOC AMER

Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of approximately 0.5-mu-m.

リンク情報
DOI
https://doi.org/10.1364/AO.30.003617
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:A1991GE64100012&DestApp=WOS_CPL
ID情報
  • DOI : 10.1364/AO.30.003617
  • ISSN : 0003-6935
  • Web of Science ID : WOS:A1991GE64100012

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