Papers

Peer-reviewed
1999

Small rotation angle measurement using an imaging method

THREE-DIMENSIONAL IMAGING, OPTICAL METROLOGY, AND INSPECTION V
  • T Suzuki
  • ,
  • H Nakamura
  • ,
  • JE Greivenkamp
  • ,
  • O Sasaki

Volume
3835
Number
First page
14
Last page
21
Language
English
Publishing type
Research paper (international conference proceedings)
Publisher
SPIE-INT SOC OPTICAL ENGINEERING

A system of small rotation angle measurement based on the fringe projection is proposed and demonstrated. This system has potential for a broad range of uses and a robustness for the external disturbances, because it requires no coherent light. The setup is very simple and applicable to the automatic on-line measurement. Several measurements indicate a sensitivity of 3 arcsec.

Link information
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000084180700002&DestApp=WOS_CPL
ID information
  • ISSN : 0277-786X
  • Web of Science ID : WOS:000084180700002

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