2001年
High-speed sinusoidal phase modulating laser diode interferometer with a feedback control to eliminate external disturbance
OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN 2001)
- ,
- ,
- 巻
- 4416
- 号
- 開始ページ
- 392
- 終了ページ
- 395
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1117/12.427093
- 出版者・発行元
- SPIE-INT SOC OPTICAL ENGINEERING
A surface profiler incorporating a feedback controller that eliminates external disturbances is proposed and demonstrated. Its overall performance is dependent upon the frequency response of the feedback loop. The frequency of modulating signal strongly influences response of the feedback controller. When using an integrating-bucket method, however, the CCD camera must be operated at the NTSC-approved modulating frequency. Our technique uses electronic-shutter equipped CCD camera. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating-bucket method under the NTSC standards.
- リンク情報
- ID情報
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- DOI : 10.1117/12.427093
- ISSN : 0277-786X
- Web of Science ID : WOS:000171469500086