論文

査読有り
2001年

High-speed sinusoidal phase modulating laser diode interferometer with a feedback control to eliminate external disturbance

OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN 2001)
  • T Suzuki
  • ,
  • T Maki
  • ,
  • O Sasaki

4416
開始ページ
392
終了ページ
395
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.1117/12.427093
出版者・発行元
SPIE-INT SOC OPTICAL ENGINEERING

A surface profiler incorporating a feedback controller that eliminates external disturbances is proposed and demonstrated. Its overall performance is dependent upon the frequency response of the feedback loop. The frequency of modulating signal strongly influences response of the feedback controller. When using an integrating-bucket method, however, the CCD camera must be operated at the NTSC-approved modulating frequency. Our technique uses electronic-shutter equipped CCD camera. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating-bucket method under the NTSC standards.

リンク情報
DOI
https://doi.org/10.1117/12.427093
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000171469500086&DestApp=WOS_CPL
ID情報
  • DOI : 10.1117/12.427093
  • ISSN : 0277-786X
  • Web of Science ID : WOS:000171469500086

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