Jul, 2004
Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam
APPLIED OPTICS
- ,
- ,
- Volume
- 43
- Number
- 21
- First page
- 4157
- Last page
- 4163
- Language
- English
- Publishing type
- Research paper (scientific journal)
- DOI
- 10.1364/AO.43.004157
- Publisher
- OPTICAL SOC AMER
A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm. (C) 2004 Optical Society of America.
- Link information
- ID information
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- DOI : 10.1364/AO.43.004157
- ISSN : 1559-128X
- eISSN : 2155-3165
- Web of Science ID : WOS:000222898600006