2005年7月
Thickness and surface profile measurement by a sinusoidal wavelength-scanning interferometer
Optical Review
- ,
- ,
- 巻
- 12
- 号
- 4
- 開始ページ
- 319
- 終了ページ
- 323
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1007/s10043-005-0319-0
We propose a sinusoidal wavelength-scanning interferometer for measuring thickness and surface profile of a thin film. The interference signal contains phase modulation amplitude Z and phase α which are related to the positions and profiles of the reflecting surfaces, respectively. By reducing the difference between the detected signal and the estimated signal using the multidimensional nonlinear least-squares algorithm, we estimate values of Z and α. Experimental results show that the front and rear surfaces of a silica glass plate of 20 μm-thickness could be measured with an error less than 10 nm. © 2005 The Optical Society of Japan.
- ID情報
-
- DOI : 10.1007/s10043-005-0319-0
- ISSN : 1340-6000
- SCOPUS ID : 24944540369