論文

査読有り
2006年2月

Measurement of sectional profile of V-shaped metal cylinders using a sinusoidally vibrating interference pattern

OPTICAL ENGINEERING
  • JH Li
  • ,
  • O Sasaki
  • ,
  • T Suzuki

45
2
開始ページ
023601_1
終了ページ
023601_5
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1117/1.2166848
出版者・発行元
SPIE-INT SOCIETY OPTICAL ENGINEERING

A method is proposed for accurately measuring a sectional profile of a metal cylinder. In this method a sinusoidally vibrating sinusoidal interference pattern is used to generate an exact spatial scale along one direction. Light from top points of a metal cylinder surface is extracted by spatial filtering in an afocal imaging system to form an image of the top points. A time-varying signal is detected in the image, and a sectional profile of the metal cylinder is measured from the phase of the detected signal on a position where the amplitude of the signal has a maximum value. Detection of the amplitude and the phase is carried out easily and exactly with sinusoidal phase-modulating interferometry. (c) 2006 Society of Photo-Optical Instrumentation Engineers.

リンク情報
DOI
https://doi.org/10.1117/1.2166848
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000236172800008&DestApp=WOS_CPL
ID情報
  • DOI : 10.1117/1.2166848
  • ISSN : 0091-3286
  • Web of Science ID : WOS:000236172800008

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