2006年2月
Measurement of sectional profile of V-shaped metal cylinders using a sinusoidally vibrating interference pattern
OPTICAL ENGINEERING
- ,
- ,
- 巻
- 45
- 号
- 2
- 開始ページ
- 023601_1
- 終了ページ
- 023601_5
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1117/1.2166848
- 出版者・発行元
- SPIE-INT SOCIETY OPTICAL ENGINEERING
A method is proposed for accurately measuring a sectional profile of a metal cylinder. In this method a sinusoidally vibrating sinusoidal interference pattern is used to generate an exact spatial scale along one direction. Light from top points of a metal cylinder surface is extracted by spatial filtering in an afocal imaging system to form an image of the top points. A time-varying signal is detected in the image, and a sectional profile of the metal cylinder is measured from the phase of the detected signal on a position where the amplitude of the signal has a maximum value. Detection of the amplitude and the phase is carried out easily and exactly with sinusoidal phase-modulating interferometry. (c) 2006 Society of Photo-Optical Instrumentation Engineers.
- リンク情報
- ID情報
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- DOI : 10.1117/1.2166848
- ISSN : 0091-3286
- Web of Science ID : WOS:000236172800008