Papers

Peer-reviewed
2009

Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer

OPTICAL INSPECTION AND METROLOGY FOR NON-OPTICS INDUSTRIES
  • Osami Sasaki
  • ,
  • Ryota Yamamura
  • ,
  • Kazushi Yokoyama
  • ,
  • Takamasa Suzuki

Volume
7432
Number
First page
74320
Last page
Language
English
Publishing type
Research paper (international conference proceedings)
DOI
10.1117/12.827352
Publisher
SPIE-INT SOC OPTICAL ENGINEERING

A collimated line beam is incident at an oblique incident angle of 0.61 rad into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3.5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a two-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5 mu m and width of about 0.15 mm formed on the inner surface can be measured with an error less than 0.3 mu m.

Link information
DOI
https://doi.org/10.1117/12.827352
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000317931000016&DestApp=WOS_CPL
ID information
  • DOI : 10.1117/12.827352
  • ISSN : 0277-786X
  • Web of Science ID : WOS:000317931000016

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