2009
Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source
Proceedings of SPIE - The International Society for Optical Engineering
- ,
- ,
- Volume
- 7511
- Number
- First page
- 7511B
- Last page
- Language
- English
- Publishing type
- Research paper (international conference proceedings)
- DOI
- 10.1117/12.840190
A halogen lamp and an acousto-optic tunable filter are used to construct a sinusoidal wavelength-scanning interferometer with the scanning width of 210 nm. A linear wavelength-scanning with the scanning width of 220 nm is utilized to determine amplitudes of three different interference signals produced from multiple-reflection lights by front and rear surfaces of a thin film. Amplitudes of time-varying phases produced by a sinusoidal wavelength-scanning and constant phases in the interference signals are estimated by minimizing a difference between detected signals and theoretical ones. From the estimated values, the positions of the front and rear surface of the thin film with a thickness of about 460 nm are measured with an error less than 4 nm. © 2009 SPIE.
- Link information
- ID information
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- DOI : 10.1117/12.840190
- ISSN : 0277-786X
- SCOPUS ID : 77955676736